TEL Delivers 500th Etch System in the U.S.Business Editors & High-Tech Writers NOTE TO MEDIA: Photo and Logo are available in a Smart News Release(tm) on Business Wire's Home Page at www.businesswire.com and at www.newstream.com AUSTIN, Texas--(BUSINESS WIRE)--Oct. 10, 2001 Tokyo Electron (TEL TEL Telephone TEL Telegram TEL Telugu (langauge) TEL Terrorist Exclusion List TEL Technology-Enhanced Learning TEL Transporter-Erector-Launcher TEL Tetra-Ethyl Lead TEL Team Deutsche Telekom ) is proud to announce the delivery of their 500th etch system in the United States. The Telius(tm), TEL's 300mm dielectric etch system, was recently delivered to International SEMATECH SEMATECH Semiconductor Manufacturing Technology for use in their Advanced Tool Development Facility (ATDF ATDF American Tap Dance Foundation ATDF Advanced Technology Development Facility, Inc (Austin, TX) ATDF ASCII Test Data Format (semi-conductor industry) ATDF Automated Target Data Fusion ). TEL's U.S. install base includes 200mm UNITY(R) series equipment, and the newer 300mm Telius product line. TEL is a global market leader in etch equipment, with over 60% market share in dielectric etch. Their systems span a wide range of critical etch applications, including: SAC, Dual Damascene, Low-k dielectrics, Poly Gate and Silicon Deep Trench Etch. The company currently offers two plasma source technologies, MERIE MERIE Magnetically Enhanced Reactive Ion Etching and dual high frequency plasma etching. The DRM (MERIE source) has driven TEL's success in both Dielectric and Silicon Deep Trench etch applications. TEL's newest chamber series, SCCM SCCM Society of Critical Care Medicine SCCM System Center Configuration Manager (Microsoft) SCCM Standard Cubic Centimeters per Minute SCCM Software Change and Configuration Management SCCM South Carolina Columbia Mission , utilizes an advanced dual-high-frequency RF source to enable selective plasma dissociation and independent control of plasma bias. "The delivery of our 500th platform in the U.S. is a milestone for TEL, having only begun actively marketing etch systems in the U.S. in 1994. The rapid growth of our etch sales has made the U.S. one of our largest markets, and has given TEL U.S. market share leadership in dielectric etch," said Mitsuru Onozato, GM of the Litho-Cell Group at TEL. "TEL is committed to supporting the U.S. market. We established an etch manufacturing and process demonstration facility in Massachusetts and have located our engineers across the U.S. near their customer sites." Juergen Woehl, Fab manager at International SEMATECH, commented, "We are proud to have one of the leading etch manufacturers represented in our 300mm facility. The tool will be used for our low-k baseline, targeting the 100nm node and below. The Telius will complement our existing 200mm UNITY platform, already in use for three years and aid our transition of ultra low-k films to 300mm wafers." About International SEMATECH International SEMATECH is a global technology development consortium of 13 semiconductor manufacturers. International SEMATECH's members gain a manufacturing advantage through cooperative work on semiconductor manufacturing technology. The consortium's development programs include lithography, interconnect, front end processes, environment, safety and health, and manufacturing methods and productivity. International SEMATECH's members are Agere Systems, AMD (Advanced Micro Devices, Inc., Sunnyvale, CA, www.amd.com) A major manufacturer of semiconductor devices including x86-compatible CPUs, embedded processors, flash memories, programmable logic devices and networking chips. , Conexant, Hewlett-Packard, Hynix, IBM, Infineon, Intel, Motorola, Philips, STMicroelectronics, Texas Instruments and TSMC TSMC Taiwan Semiconductor Manufacturing Company, Ltd TSMC Taiwan Semiconductor Manufacturing Corporation TSMC Traffic Systems Management Center TSMC Toll Station Management Controller TSMC Transportation Supply Maintenance Command TSMC Technical Services Manager Code . http://www.sematech.org About TEL TEL, established in 1963, is a leading supplier of innovative semiconductor and LCD production equipment worldwide. Product lines include coater/developers, oxidation/diffusion furnaces, dry etchers, CVD CVD Cardiovascular disease, see there systems, sputtering systems (PVD PVD abbr. peripheral vascular disease PVD Peripheral vascular disease, see there ), wet cleaning systems and test systems. In Japan, TEL distributes other leading edge semiconductor equipment tools, such as metrology tools or process control systems. In addition, TEL distributes high-quality computer systems, semiconductor devices and electronic components of other leading suppliers, as well as computer network-related products from around the world. To support this diverse product base, TEL has strategically located research & development, manufacturing, sales and service locations all over the world. TEL's revenues in the last fiscal year exceed 723.9 billion yen, or more than 6 billion dollars. TEL is a publicly held company listed on the Tokyo Stock Exchange Tokyo Stock Exchange Main stock market of Japan, located in Tokyo. It opened in 1878 to provide a market for the trading of government bonds newly issued to former samurai. . http://www.tel.co.jp Note: A Photo is available at URL URL in full Uniform Resource Locator Address of a resource on the Internet. The resource can be any type of file stored on a server, such as a Web page, a text file, a graphics file, or an application program. : http://www.businesswire.com/cgi-bin/photo.cgi?pw.101001/bb3 |
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