TEL, Ebara and Dainippon Screen Announce Founding of Joint Venture Company.Business Editors and High-Tech Writers TOKYO--(BUSINESS WIRE)--Sept. 5, 2002 Tokyo Electron Limited (TEL TEL Telephone TEL Telegram TEL Telugu (langauge) TEL Terrorist Exclusion List TEL Technology-Enhanced Learning TEL Transporter-Erector-Launcher TEL Tetra-Ethyl Lead TEL Team Deutsche Telekom ; Head Office: Minato-ku, Tokyo; CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. , President: Tetsuro Higashi), Ebara Corporation (Head Office: Ota-ku, Tokyo; President: Masatoshi Yoda), and Dainippon Screen Mfg. Co., Ltd. (Head Office: Kyoto City, Kyoto Prefecture; Chairman and President: Akira Ishida) announced that they have entered into a memorandum of agreement A memorandum of agreement (MOA) or cooperative agreement is a document written between parties to cooperatively work together on an agreed upon project or meet an agreed upon objective. The purpose of an MOA is to have a written understanding of the agreement between parties. to found a joint venture company, the purpose of which will be to develop, manufacture, and market a low energy electron beam direct writing system. At present, information appliances and other kinds of digital hardware are generating attention the world over. The short product lifecycle of system LSI LSI: see integrated circuit. (Large Scale Integration) Between 3,000 and 100,000 transistors on a chip. See SSI, MSI, VLSI and ULSI. chips developed and manufactured for use in these devices, however, leads to soaring manufacturing costs of masks for miniaturization min·i·a·tur·ize tr.v. min·i·a·tur·ized, min·i·a·tur·iz·ing, min·i·a·tur·iz·es To plan or make on a greatly reduced scale. min , as well as the mask manufacturing lead times, which are becoming extremely serious issues. Based on the electron beam direct writing technology developed during many years of research by Toshiba Corporation (Head Office: Minato-ku, Tokyo; President: Tadashi Okamura), this is a mask-less lithography system that pursues quick turnaround time (1) In batch processing, the time it takes to receive finished reports after submission of documents or files for processing. In an online environment, turnaround time is the same as response time. , advantageous to smaller manufacturing operations with a large variety of devices, as seen in system on a chip (SoC) and system LSI chip products. A major feature of the system is that it will employ both a low energy electron beam method, which is highly effective as a countermeasure against proximity effects, and a character projection method, which uses a circuit block as a single character (fixed pattern) to write that pattern repeatedly. By employing these methods, the system will improve throughput substantially and sizably shorten production lead time. With this key technology from Toshiba, the joint venture company will also develop related enabling technologies, as well as conduct process verifications, with the aim of going into a full-scale shipment of a system capable of a 65nm resolution by 2005. Details of the joint venture company are as follows: Name: E-Beam Corporation (tentative name) Address: 12-26, Konan 2-chome, Minato-ku, Tokyo Capitalization: 450 million yen Investment ratios: TEL: 40%, Ebara: 40%, Dainippon Screen: 20% President: Hiroshi Furukawa (currently Counselor, Ebara Corporation) Vice President, Executive Officer: Akira Miura (currently Corporate Staff, Marketing Dept. Tokyo Electron Ltd.) Employees: 25 Date of establishment (planned): End of September 2002 About TEL TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD (1) (Flat Panel Display) See LCD, plasma display, EL display, FED and flat panel display. (2) (Field Programmable Device) An umbrella term for all chips that can be programmed by the customer including SPLDs, CPLDs and FPGAs. See PLD. production equipment worldwide. Product lines include coater/developers, thermal processing system, dry etchers, CVD CVD Cardiovascular disease, see there systems, sputtering A popular method for adhering thin films onto a substrate. Sputtering is done by bombarding a target material with a charged gas (typically argon) which releases atoms in the target that coats the nearby substrate. It all takes place inside a magnetron vacuum chamber under low pressure. systems (PVD PVD abbr. peripheral vascular disease PVD Peripheral vascular disease, see there ), wet cleaning systems, and test systems. In Japan, TEL distributes other leading edge semiconductor equipment tools, such as metrology tools or process control systems. In addition, TEL distributes high quality computer systems, semiconductor devices and electronic components of other leading suppliers, as well as computer network related products from around the world. To support this diverse product base, TEL has strategically located research & development, manufacturing, sales, and service locations all over the world. TEL is a publicly held company listed on the Tokyo Stock Exchange Tokyo Stock Exchange Main stock market of Japan, located in Tokyo. It opened in 1878 to provide a market for the trading of government bonds newly issued to former samurai. . http://www.tel.co.jp About EBARA Founded in 1912, Ebara Corporation is one of the world's principal manufacturers of fluid transfer machinery, with particularly strong positions in pumps, compressors. The Company is also a prominent contractor of environmental engineering systems, focusing on the realization of the "sustainable society." Ebara is actively developing and commercializing new energy technologies, including wind power generators, fuel cell cogeneration systems, and photovoltaic power generators. Ebara is also a leading supplier of equipment and component to the semiconductor device manufacturing industry. Key products in this sector include chemical mechanical polishing systems, dry vacuum pumps, and other equipment, such as damascene metal plating systems, to assist the industry in meeting the demands of manufacturing the next generation of semiconductor devices. About Dainippon Screen Dainippon Screen Mfg. Co., Ltd. (Kyoto, Japan), is a $1.3 billion company quoted on the Tokyo stock exchange. It was established in 1943, and is one of the leading suppliers of semiconductor fabrication equipment, as well as the world's largest supplier of batch and single wafer cleaning systems. It is also a well-known manufacturer and supplier of flat panel display A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time production equipment and prepress and printing equipment. The company's operations are based on core technologies of image recognition, image processing, image transfer, and exposure. http://www.screen.co.jp/ |
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