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Swagelok Company Expands Atomic Layer Deposition (ALD) Valve Product Line; ALD6 Series High-Flow Valve is Latest Addition.


SOLON, Ohio -- The Swagelok(R) ALD ALD
abbr.
adrenoleukodystrophy


ALD,
n.pr See adrenoleukodystrophy.


ALD

aldolase.
6 series high-flow diaphragm valve is the latest addition to the atomic layer deposition A semiconductor manufacturing technique that deposits a single layer on a chip that is only one atom or one molecule thick. As elements on a chip decreased to below 100 nm, this essential technology for making the chip ever smaller became commercial after the turn of the 21st century.  (ALD) valve product line. This ultrahigh-purity, pneumatically actuated valve features a flow coefficient of 0.62. Swagelok Company's patent-pending flow setting feature allows flow to be set after the valve is assembled to maximize valve-to-valve flow consistency and enhance process stability.

Manufactured from 316L VIM/VAR stainless steel stainless steel: see steel.
stainless steel

Any of a family of alloy steels usually containing 10–30% chromium. The presence of chromium, together with low carbon content, gives remarkable resistance to corrosion and heat.
, the ALD6 series valve body is available with 1/4 and 1/2 inch VCR VCR: see videocassette recorder.
VCR
 in full videocassette recorder

Electromechanical device that records, stores on a videotape cassette, and plays back on a TV set recorded images and sound.
(R) face seal fitting, as well as 3/8 and 1/2 inch and 10 and 12 mm tube butt weld end connections. An Elgiloy(R) diaphragm provides an excellent combination of corrosion resistance, strength, and fatigue characteristics.

The entire Swagelok ALD diaphragm valve line is designed for the performance demands of atomic layer deposition processing, while providing the cleanliness required in a semiconductor application. Valves feature a rapid actuation speed of less than 5 milliseconds and ultrahigh ul·tra·high  
adj.
Exceedingly high: an ultrahigh vacuum. 
 cycle life--more than 25 million cycles during product evaluation. Available options include a high-temperature model--rated for temperatures up to 392 degrees F (200 degrees C)--as well as multi-port, multi-valve manifold, and modular surface mount configurations.

Headquartered in Santa Clara, California Santa Clara, California (IPA: /ˌsæntəˈklærə/) , founded in 1777 and incorporated in 1852, is a city in Santa Clara County, in the U.S. state of California. , with manufacturing and distribution facilities located near Cleveland, Ohio, U.S.A., Swagelok Semiconductor Services Company is a strategic business unit of Swagelok Company, dedicated to developing and manufacturing fluid system component technology for the global semiconductor manufacturing industry. For more information, visit the Web site at www.swagelok.com http://www.swagelok.com/industry/semiconductor/index.asp.
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Copyright 2005, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Jul 13, 2005
Words:259
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