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Surfaces, interfaces, and thin films for microelectronics.


Surfaces, interfaces, and thin films for microelectronics.

Irene, Eugene A.



515 pages




Detailing fundamentals and important analytical techniques, Irene (chemistry, University of North Carolina-Chapel Hill) helps scientists and engineers understand existing microelectronic applications and design new ones. Chapters in Part I of the book explain surface science fundamentals, covering both geometric and electronic structure, surface thermodynamics, morphology, and a sample of surface science techniques. Part II covers microelectronics applications such as films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the silicon-silicon dioxide interface, and other MOSFET interfaces. The book can be used as a self-study guide for professionals in the electronics industry, and as a text for upper-level undergraduate and graduate students taking courses in materials science, chemistry, physics, and electrical engineering.

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Publication:SciTech Book News
Article Type:Book Review
Date:Jun 1, 2008
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