Strasbaugh, NOVA and MITEX Develop Run-to-run Control CMP Integration.SAN LUIS OBISPO San Luis Obispo (săn l  `ĭs ōbĭs`pō), city (1990 pop. 41,958), seat of San Luis Obispo co., S Calif., near San Luis Obispo Bay; inc. 1856. , Calif.--(BUSINESS WIRE)--March 27,1998--
Strasbaugh, a world leader in the chemical mechanical polishing (CMP CMP (cytidine monophosphate): see cytosine. (1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information ) industry, NOVA Measuring Instruments Ltd. and MITEX Solutions Inc. have formed an alliance to integrate run-to-run control into existing and next-generation Strasbaugh CMP tools. Strasbaugh is the first CMP manufacturer to implement this closed loop process control system which results in consistent removal thickness and uniformity over long CMP production runs. The combined joint project represents a significant milestone in developing integrated closed loop monitor and control of oxide polishing for CMP. "Working together has enabled us to look at innovative solutions for next-generation CMP technologies CMP Technology (formerly CMP Media) is a business-to-business multimedia company that provides information and integrated marketing services to technology professionals worldwide. ," commented James Moyne, president of MITEX. Strasbaugh has combined the industry-proven NovaScan (manufactured by NOVA) in-line metrology metrology Science of measurement. Measuring a quantity means establishing its ratio to another fixed quantity of the same kind, known as the unit of that kind of quantity. system with an innovative run-to-run control system (developed by MITEX) to provide a more stable and repeatable production CMP process. NovaScan offers pattern recognition and multiple-site measurement capability allowing calculation of average film thickness and within-wafer non-uniformity for every wafer (1) A small, thin continuous-loop magnetic tape cartridge that has been used from time to time for data storage and specialized applications. (2) The base unit of chip making. It is a slice taken from a salami-like silicon crystal ingot up to 12" (300mm) in diameter. . The run-to-run controller modifies polish parameters such as polish time and back pressure in response to post-polish measured values. Closing the control loop between NovaScan, the run-to-run controller, and the tool allows automated au·to·mate v. au·to·mat·ed, au·to·mat·ing, au·to·mates v.tr. 1. To convert to automatic operation: automate a factory. 2. control of user-defined parameters. This results in consistent removal thickness and uniformity over long CMP production runs. Pad life is extended, machine utilization is improved, with scrap and rework re·work tr.v. re·worked, re·work·ing, re·works 1. To work over again; revise. 2. To subject to a repeated or new process. n. virtually eliminated. -0-
The benefits of run-to-run control include:
1) Tighter control of process/repeatable results
2) Hands-off operation
3) Reduced number of test wafers
4) Increased life of consumables
5) Thickness uniformity control
Run-to-run control is available now in the Strasbaugh Model 6DS-SP planarizer and will be implemented on the Symphony-CMP in 1999. NOVA manufactures NovaScan, an in-line film thickness measurement sensor. This sensor is an integral part of the run-to-run control system and includes a SECS/GEM interface, and average thickness and uniformity measurement. MITEX was founded in 1995 to provide industrial-quality next-generation control solutions. The core company technology called The Generic Cell Controller (GCC GCC: see Gulf Cooperation Council. (compiler, programming) GCC - The GNU Compiler Collection, which currently contains front ends for C, C++, Objective-C, Fortran, Java, and Ada, as well as libraries for these languages (libstdc++, libgcj, etc). ) is the key component of the run-to-run control software. With five decades of precision polishing and more than 11,000 machines built (more than 1,500 semiconductor machines), Strasbaugh CMP systems have been chosen by more than 40 major semiconductor manufacturers worldwide. For more information, contact Strasbaugh at 805/541-6424 (phone), 805/541-6525 (FAX). Visit Strasbaugh on the World Wide Web at www.strasbaugh.com. CONTACT: Strasbaugh, San Luis Obispo Susan Price Susan Price, born 1955 in Dudley in the West Midlands, is an award-winning English writer of novels for young adults. She also writes for younger children. She still lives in the Black Country. , 805/782-5377 Sprice@strasbaugh.com |
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