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SiGen Licenses its NanoBond Process to EV Group.


Business Editors/High-Tech Writers

SAN JOSE San Jose, city, United States
San Jose (sănəzā`, săn hōzā`), city (1990 pop. 782,248), seat of Santa Clara co., W central Calif.; founded 1777, inc. 1850.
, Calif.--(BUSINESS WIRE)--Oct. 31, 2003

Silicon Genesis Corporation (SiGen), a leading developer of innovative Silicon-On-Insulator (SOI (Silicon On Insulator) A chip architecture that increases transistor switching speed by reducing capacitance (build-up of electrical charges in the transistor's elements), and thus reducing the discharge time. The power requirement is also reduced in some designs. ) and other engineered wafer technologies, announced today that it has entered into a license agreement with EV Group of Scharding, Austria (EVG EVG Elektronisches Vorschaltgerät (German: Electronic Ballast)
EVG Enterrement de Vie de Garçon (French)
EVG Evaluator Group
). Under this agreement, SiGen will transfer equipment, process, Intellectual Property (IP) rights and related know-how to EVG to enable the equipment manufacturer to integrate and offer the SiGen NanoBond(TM) technologies in EVG's line of wafer bonding tools. NanoBond(TM) is a part of the SiGen NanoTec(TM) license family, a premier suite of layer-transfer and other engineered wafer technologies that enable new wafer configurations such as GeOI, SOI, and strained silicon A technique that deposits silicon (Si) on top of silicon germanium (SiGe) for making transistors on a chip. In so doing, the silicon atoms are stretched ("strained") to line up with the silicon germanium atoms, which are wider apart.  wafers. NanoBond(TM) is SiGen's patented plasma-activated bonding process that enables significantly higher bond strengths than conventional wet bonding techniques. This process is applicable for a wide range of bonding and layer transfer processes including SOI, MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s.  and other laminated structures. This alliance is a logical next step as EVG and SiGen have been working together on new developments in modular equipment design for plasma-activated wafer bonding since 1998.

"We at SiGen are excited to license our clean, production proven NanoBond(TM) process technologies to EVG, the wafer bonding equipment world leader," said Francois Henley, founder and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of SiGen. "This license augments our relationship and is consistent with our recent transition to focus on licensing, protecting and strengthening our intellectual property. The bond processes now offered by EVG can address a wide range of applications due to its flexibility in bond optimization made possible by the variety of plasma gases, pressures and other parameters available."

"We are the only company providing proven equipment and process technologies based on a solid IP portfolio," says Dr. Peter Podesser CEO of EVG. "Our LowTemp(R) Dry Activated Plasma Bonding technology offers the broadest process flexibility, results in the highest bond strength at the lowest possible temperature. Safe system designs, utilizing small volumes of inert, oxidizing or reducing gas in a chamber provide the lowest cost of ownership (COO) with a safety first policy. I expect this new capability to become an industry standard and enable new material combinations for leading edge applications," explains Dr. Podesser.

SiGen is transitioning from an Intellectual Property (IP) company with wafer production capability to a fabless IP company. SiGen's IP technology has been proven with both product and process validation from multiple device and wafer makers. Going forward, SiGen is focusing on licensing its technology to volume manufacturing partners and continuing next generation IP development using its R&D facility. SiGen also offers ongoing support services support services Psychology Non-health care-related ancillary services–eg, transportation, financial aid, support groups, homemaker services, respite services, and other services  in the use of its technologies.

About Silicon Genesis

Founded in 1997, Silicon Genesis Corporation (SiGen) is a leading provider of Silicon-On-Insulator (SOI) process technology targeted for use in the production of engineered wafers that enable NanoTechnology applications With nanotechnology, a large set of materials and improved products rely on a change in the physical properties when the feature sizes are shrunk. Nanoparticles for example take advantage of their dramatically increased surface area to volume ratio. Their optical properties, e.g.  with next generation products. Headquartered in San Jose, California San Jose (IPA: /ˌsænhoʊˈzeɪ/) is the third-largest city in California, and the tenth-largest in the United States. It is the county seat of Santa Clara County.  (Silicon Valley), the Company's proprietary NanoCleave(TM) (Layer-transfer), NanoBond(TM) (Plasma-activated bonding), and NanoSmooth(TM) (Epi Smoothing/Epi Thickening) process steps have allowed SiGen to become a leading provider of innovative substrates through its process licensing. SiGen promotes its layer-transfer and engineered wafer technologies by continued development of its advanced process and equipment technologies as well as through strategic alliances. For more information on Silicon Genesis, visit http://www.sigen.com.

Editorial:

Silicon Genesis Corporation

61 Daggett Drive

San Jose, CA 95134

Phone: (408) 228-5858, Fax: (408) 228-5859

E-mail address See Internet address.

e-mail address - electronic mail address
: lnye@sigen.com

About EV Group

EV Group (EVG), founded in 1980, is headquartered in Scharding, Austria and has subsidiaries in Phoenix, Arizona Phoenix /ˈfiːˌnɪks/ (English: Phoenix, Navajo: Hoozdo, lit. "the place is hot", Western Apache: Fiinigis) is the capital and the most populous city of the U.S. , Cranston, Rhode Island Cranston, once known as Pawtuxet, is a city in Providence County, Rhode Island, United States. With a population of 79,269 as of the 2000 census, it is the third largest city in the state. The center of population of Rhode Island is located in Cranston [2]. , Yokohama, Japan and Chung-Li, Taiwan, as well as representatives around the world with a sales and customer support network. EVG manufactures leading-edge wafer bonders, mask and bond aligners, photoresist coaters and cleaners for microelectromechanical systems See MEMS.  (MEMS), Nanoimprint and semiconductor market segments. Being the technology and market leader for wafer bonding systems, EVG has set worldwide industry standards in double-side lithography and aligned wafer bonding. EVG's systems are installed worldwide in high-volume production environments as well as research and development facilities. For more information visit www.EVGroup.com, E-mail sales@EVGroup.at or call EVG directly at +43 7712 5311-0.

Editorial:

EV Group

DI Erich Thallner Strasse 1

A-4780 Scharding

Austria

Phone: +43 7712 5311-4001

Fax: +43 7712 5311-4600

E-mail: info@EVGroup.at

Contact: Anna Reiter
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Publication:Business Wire
Date:Oct 31, 2003
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