Setting the Industry Gold Standard: 15th Anniversary of Aerial Imaging Technology from Carl Zeiss.JENA, Germany and SAN FRANCISCO -- At Semicon West 2008, San Francisco/USA, Carl Zeiss SMT (1) (Surface Mount Technology) See surface mount. (2) (Station ManagemenT) An FDDI network management protocol that provides direct management. Only one node requires the software. SMT - Station Management is celebrating 15 years of success with its proprietary Aerial Image Measurement Technology applied in AIMS[TM] Mask Qualification Systems. Since 1993, AIMS[TM] has been established as the de facto industry standard for photo mask defect printability analysis. By keeping abreast of ongoing developments in lithography and reticle enhancement technologies (RET), AIMS[TM] has enabled the manufacture of masks with ever smaller critical dimensions for over 15 years, and is well prepared to continue to do so for future technology nodes. Within Carl Zeiss SMT, the Semiconductor Metrology Systems division (SMS (1) (Storage Management System) Software used to routinely back up and archive files. See HSM. (2) (Systems Management Server) Systems management software from Microsoft that runs on Windows NT Server. ) capitalizes on a close relationship with the Lithography Optics division -- the world-wide leading manufacturer of projection and illumination optics for lithography and its exclusive partner, ASML ASML Abstract State Machine Language ASML Anisotropic Shielded Microstrip Line . "Once developed as a scanner emulator, AIMS[TM] made a huge step forward, and today offers a variety of valuable mask manufacturing applications. The ability to quantify the entire mask's optical performance is an enabling function of the manufacturing of advanced photo masks," said Frank Averdung, Managing Director of the Semiconductor Metrology Systems division of Carl Zeiss SMT. "Because of the continuing critical importance of qualifying photo masks for semiconductor production, SEMATECH SEMATECH Semiconductor Manufacturing Technology has supported the development of AIMS[TM] platforms at 248nm, 193nm dry and 193nm immersion," said Michael Lercel, SEMATECH Director of Lithography. "Aerial imaging of masks has enabled faster cycles of learning in the mask industry, and has been utilized in all of the recent lithography transitions, most recently in immersion lithography." Mask manufacturers benefit from the fact that AIMS[TM] is able to provide both defect printability and repair quality prediction using all relevant imaging factors such as mask substrate effects (e.g. mask 3D effects), High-NA (Numerical Aperture) induced vector effects and RET including OPC (Optical Proximity Correction Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The two most common applications for OPC are linewidth differences between features in regions of different density (e. ) techniques. "With regards to the upcoming lithographic lith·o·graph n. A print produced by lithography. tr.v. lith·o·graphed, lith·o·graph·ing, lith·o·graphs To produce by lithography. technique of double-patterning, actinic actinic /ac·tin·ic/ (ak-tin´ik) producing chemical action; said of rays of light beyond the violet end of the spectrum. ac·tin·ic adj. mask qualification using all relevant imaging information is crucial and mandatory," added Averdung. The origin of all current AIMS[TM] systems is the MSM MSM - Micronetics Standard MUMPS 100, which was first introduced to the market in 1993. It uses a special method of optical mask analysis that was developed in cooperation with IBM during the early '90s. These early systems allowed for analyzing the defect printability of photo masks under lithography stepper or scanner-equivalent illumination conditions. PI No. 131-2008-ENG July 2008 About Carl Zeiss SMT As the global leader in innovative lithography optics, as well as optical and particle-beam based inspection, analysis and measuring systems, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and academic R&D. Decades of market leadership are based on the success of its leading know-how in light, electron and ion-optical technologies. Together with its subsidiaries in Germany, England, France and the USA, the international group of companies has more than 2,400 employees. In fiscal year 2006/07, Carl Zeiss SMT AG generated revenues of over EUR EUR In currencies, this is the abbreviation for the Euro. Notes: The currency market, also known as the Foreign Exchange market, is the largest financial market in the world, with a daily average volume of over US $1 trillion. 1 billion. Carl Zeiss SMT AG is a wholly owned subsidiary Wholly Owned Subsidiary A subsidiary whose parent company owns 100% of its common stock. Notes: In other words, the parent company owns the company outright and there are no minority owners. of Carl Zeiss AG. For further information, see: www.smt.zeiss.com. |
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