SensArray intros Thermal TRACK 5 Bluetooth metrology system for IC equipment.SensArray Corporation, a provider of process optimization Process optimization is the practice of making changes or adjustments to a process, to get results. Optimization is the use of specific techniques to determine the most cost effective and efficient solution to a problem or design for a process. tools for semiconductor fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. , has announced the availability of the Thermal TRACK 5 metrology system with Bluetooth-enabled ISIS (Intelligent Sensor An intelligent sensor takes some predefined action when it senses the appropriate input (light, heat, sound, motion, touch, etc.). Description The sensor has to do the following tasks:
Designed for real time, in situ In place. When something is "in situ," it is in its original location. wafer temperature measurements, this compact, wireless system generates more precise measurements with greater ease than other data acquisition units on the market. With Thermal TRACK 5, customers can better optimize their equipment and processes to meet strict critical dimension budgets, leading to the more economic manufacture of high performance products. Thermal TRACK 5 combines powerful software with advanced, compact ISIS 5 data acquisition hardware to take highly accurate measurements and efficiently display, log, manage, and download thermal data for visual representation on a personal digital assistant (PDA (Personal Digital Assistant) A handheld computer for managing contacts, appointments and tasks. It typically includes a name and address database, calendar, to-do list and note taker, which are the functions in a personal information manager (see PIM). ). Using this data, customers can characterize, optimize, and maintain the thermal performance of their processing equipment. "We've listened to our customers and developed Thermal TRACK 5 to meet their need for a portable and convenient thermal process optimization tool to work in the tight confines of their fabs," said James Pascale, SensArray customer commitment advisor for ISIS 5 systems. "This product is the first step in our mission to engineer wireless metrology systems that make process monitoring and maintenance easier for our customers." Customers can use Thermal TRACK 5 to conveniently characterize wafer temperature profiles; calibrate To adjust or bring into balance. Scanners, CRTs and similar peripherals may require periodic adjustment. Unlike digital devices, the electronic components within these analog devices may change from their original specification. See color calibration and tweak. and check temperature setpoints; troubleshoot temperature-related critical dimension problems; and run pre-defined preventive maintenance The routine checking of hardware that is performed by a field engineer on a regularly scheduled basis. See remedial maintenance. preventive maintenance - (PM) To bring down a machine for inspection or test purposes. See provocative maintenance, scratch monkey. checks tailored to specific equipment and processes. The point-and-tap interface allows users to easily toggle To alternate back and forth between two states. toggle - To change a bit from whatever state it is in to the other state; to change from 1 to 0 or from 0 to 1. This comes from "toggle switches", such as standard light switches, though the word "toggle" actually refers to between different data views with three full color forms, as well as closely monitor the minimum and maximum temperatures across the wafer through the statistics display. The compact ISIS 5 module, which is sixty percent smaller than previous SensArray data acquisition modules, acquires temperature data from SensArray Process Probe instrumented wafers, with up to 17 sensors. It then communicates the data wirelessly through Bluetooth MicroNet technology to the Thermal TRACK 5 software, operating on a SensArray-qualified PDA. The full color, Pocket PC-based software accurately records the wafer temperature and uniformity measurements and displays them in a number of useful formats. The ISIS 5 module is available in either a 9/17-channel multiplexed, or a 17-channel non-multiplexed model for more accurate measurements in processes with high-speed temperature changes. Both models are offered with either thermocouple (TC) or resistance temperature detector (RTD RTD returned to duty (US DoD) RTD Rated RTD Ready to Drink RTD Richmond Times-Dispatch RTD Regional Transportation District RTD Research, Technological Development RTD Research and Technology Development RTD Real-Time Data ) sensors, and feature a low profile, high-density, smart (HDS (Hitachi Data Systems, Santa Clara, CA, www.hds.com) A leading provider of high-end storage hardware, software and services. Part of the Information Systems & Telecommunications Division of Hitachi Ltd. ) connector that allows more maneuverability around process equipment and provides less weight and pull on instrumented wafers. Additionally, the RTD ISIS modules can accommodate the Sensor Probe 1400 Series system state probes, allowing precise temperature, humidity, and airflow measurements to be taken simultaneously. The ISIS 5 module uses a highly efficient lithium ion battery that allows for 12-14 hours of operation without recharging the replaceable battery. Thermal TRACK 5 with advanced ISIS 5 hardware is currently available in the United States, Europe and Asia. |
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