SensArray Announces Wireless Temperature Metrology System for Production Surveys; Low Profile Integrated Wafer Monitors Critical Lithography Processes for Improved CD Control.FREMONT, Calif. -- SensArray(R) Corporation, an innovative provider of process optimization Process optimization is the practice of making changes or adjustments to a process, to get results. Optimization is the use of specific techniques to determine the most cost effective and efficient solution to a problem or design for a process. tools for semiconductor fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. , announces availability of its Integrated Wafer wireless temperature metrology system. This low profile product incorporates a data acquisition system within a wafer helping customers better manage their critical lithography lithography (lĭthŏg`rəfē), type of planographic or surface printing. It is distinguished from letterpress (relief) printing and from intaglio printing (in which the design is cut or etched into the plate). processes. With components embedded Inserted into. See embedded system. in the silicon wafer, Integrated Wafer produces a thermal mass Thermal mass, in the most general sense, is any mass that absorbs and holds heat. In the architectural sense, it is any mass that absorbs and stores heat during sunny periods when the heat is not desirable in the living space of a building, and then releases the heat during and dynamic response equivalent to that of a product wafer. Patented technology produces a wafer profile of less than 0.5 mm, enabling customers to gather static and dynamic temperature data during production surveys that range from 15 degrees C to 145 degrees C without equipment modification or production disruption. "As the pressure of decreasing linewidths intensifies equipment manufacturers and device makers continuously run into the same issues in controlling their equipment," said Earl Jensen, Integrated Wafer development leader, SensArray. "The synergy of new technology and unique talent, along with many discussions with our customers, has enabled us to create the revolutionary Integrated Wafer. It offers the latest technology in a logistically friendly system, saving customers time and money." The Integrated Wafer operates from a base station that provides for communications and battery charging. The base station for the 300 mm Integrated Wafer is built into a front opening unified pod pod, in botany pod or legume, dehiscent fruit of a member of the family Leguminosae (pulse family). At maturity the pod splits along its two seams and releases the enclosed seeds. (FOUP FOUP Front Opening Unified Pod ) and the 200 mm base station is located within a standard wafer cassette. By integrating the central operating hub for the wafer within standard fab equipment, the Integrated Wafer can be deployed robotically, easily traveling through the fab with limited contamination risk. The Integrated Wafer offers convenience and a low cost of ownership. Advanced battery technology and a large data storage capacity allow for comprehensive surveys of over 20 minutes or up to 52 Kilobytes of data, without recharging or downloading. Integrated Wafer batteries are warranted for more than 100 hours of usage, and are factory-replaceable, extending the life of the wafer significantly. The Integrated Wafer is available in a 300 mm (12") version with 64 sensors and a 200 mm (8") version with 52 sensors. Integrated Wafer is ideal for measuring critical hot plate heating zone elements in advanced lithography applications such as: detecting variations in temperature between bake plates; evaluating run-to-run, month-to-month bake plate repeatability; and relating dynamic temperature segments to critical dimensions. Integrated Wafer data files are fully compatible with SensArray Thermal MAP(R) Analysis software. This powerful software leverages graphic data and statistical tools providing a deeper and more comprehensive understanding of the thermal environment within production equipment, enabling customers to implement long-term optimizations to their processes. The Integrated Wafer temperature metrology system is currently available in the United States United States, officially United States of America, republic (2005 est. pop. 295,734,000), 3,539,227 sq mi (9,166,598 sq km), North America. The United States is the world's third largest country in population and the fourth largest country in area. , Europe, and Asia. To request additional information, please contact SensArray Corporation at 510-360-5600 or visit www.integratedwafer.com. About SensArray SensArray is an innovative provider of process optimization tools for semiconductor and flat panel fabrication. SensArray solutions for dynamic and static optimization allow manufacturers to manage equipment and processing environments, and provide increased control of critical parameters during manufacturing. By optimizing fabrication processes, SensArray products help to make processes more reliable, providing for improved output, and the more economic manufacture of high performance products. Based in Fremont, California For the unincorporated community in Yolo County, California, see . Fremont (IPA: /ˈfriːmɒnt/) is a city in California that was incorporated on January 23, 1956, from the merger of five smaller communities: , SensArray is privately held and has offices in Japan, Taiwan, and Korea, with international representatives in Asia and Europe. SensArray is ISO (1) See ISO speed. (2) (International Organization for Standardization, Geneva, Switzerland, www.iso.ch) An organization that sets international standards, founded in 1946. The U.S. member body is ANSI. 9001-2000 certified See certification. . For additional information about SensArray and its products, please visit www.sensarray.com. |
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