SemEquip, Inc. to Introduce ClusterCarbon(TM) Implant Material at SEMICON Japan 2006.NORTH BILLERICA, Mass. -- SemEquip([R]), an innovative leader in ion implantation sub-systems and advanced materials for semiconductor manufacturing, today announces that ClusterCarbon([TM]) Implant Material for its ClusterIon([R]) Source System technology will be introduced at SEMICON SEMICON Semiconductors Equipment and Material International Conference Japan 2006 (Booth # 2A-203) scheduled for December 6th through 8th at the Makuhari Messe, Chiba, Japan. ClusterCarbon([TM]) is a molecular carbon species for pre-amorphization implantation (PAI PAI plasminogen activator inhibitor. PAI Plasminogen activator inhibitor, see there ) and barrier to dopant dopant Any impurity added to a semiconductor to modify its electrical conductivity. The most common semiconductors, silicon and germanium, form crystalline lattices in which each atom shares electrons with four neighbours (see bonding). diffusion for advanced source drain extension formation. ClusterCarbon([TM]) replaces Germanium (Ge) PAI and monomer Carbon implant steps resulting in higher throughput and simpler process while utilizing existing Process of Record (POR POR problem-oriented record. POR abbr. problem-oriented record POR Problem-Oriented Record. ) implant parameters. Furthermore, ClusterCarbon([TM]) enables higher dopant activation and extremely abrupt, shallow junctions while extending the application life of conventional anneal To take the brittleness out of metal, plastic or certain carbon composites. Performed in the preparation of new products or in their restoration, annealing is accomplished via a heat treating process. processes. "SemEquip continues to lead the industry by introducing ClusterCarbon([TM]) for co-implantation with ClusterBoron([R]) as a new process solution for 65nm, 45nm, and 32nm source drain extension." said Brian Cohen cohen or kohen (Hebrew: “priest”) Jewish priest descended from Zadok (a descendant of Aaron), priest at the First Temple of Jerusalem. The biblical priesthood was hereditary and male. , CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. and co-founder of SemEquip. "Smooth market introduction is ensured as ClusterCarbon([TM]) works with ion implant platforms enabled with ClusterIon([R]) Source technology." SemEquip's ClusterIon[R] Source System provides up to 10x throughput gains for low-energy, high-dose implants compared to existing monomer implant platforms. ClusterIon([R]) Implant Materials are available from the Cluster Implant Material Alliance with ATMI. Jim Dietz, ATMI Director of Marketing, said, "Adding ClusterCarbon([TM]) to ATMI's implant materials portfolio further enhances our commitment to improve process efficiency as we deliver measurable productivity increases to our customers' existing and new processes." About SemEquip, Inc. SemEquip, Inc. is a technology leader in the development of ion implantation systems and advanced ion source materials for the manufacture of logic and memory semiconductor devices. SemEquip's technologies enable the utilization of cluster ion implantation for the manufacture of the world's most advanced integrated circuits at the highest throughput and lowest cost. For additional information visit us at www.semequip.com or contact Brian Bernstein, VP - Sales & Marketing. |
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