Sela announces installation of MC600 microcleaving system at Hitachi's U.S. demo facility.Sela Ltd., providing automated SEM and TEM TEM 1. transmission electron microscope. 2. triethylenemelamine. 3. transmissible encephalopathy of mink. sample preparation equipment to the semiconductor industry, has announced the installation and acceptance of their MC600 system at Hitachi High Technologies America. Earlier generations of Sela's MicroCleaving sample preparation systems are installed at many other process equipment makers' sites, but this is the first MC600 to be sold to this market segment. The Hitachi facility near Dallas is the first facility outside Japan to offer demonstration and process development of Hitachi's line of semiconductor wafer processing tools. The Sela MC600 achieves automatic and rapid cross sectioning of whole and partial wafers in preparation for final analysis of samples in SEMs (Scanning Electron Microscopes scan·ning electron microscope n. Abbr. SEM An electron microscope that forms a three-dimensional image on a cathode-ray tube by moving a beam of focused electrons across an object and reading both the electrons scattered by the object and ). Dedicated software enables automatic mapping and navigation to targets and features. The system's high throughput (9 min./sample) and high accuracy (better than 0.5 microns) significantly reduce the diagnostic cycle time for both failure analysis and process monitoring. Cross sections prepared by MicroCleaving are free of the artifacts artifacts see specimen artifacts. often introduced by alternative techniques. Hitachi High Technologies manufactures plasma etchers For the formation of integrated circuits it is necessary to structure various layers. This can be done by a Plasma etcher. Plasma etching of dielectrics, semiconductors and metals is state of the art today. , electron microscopes electron microscope: see microscope. , PFC PFC abbr. private first class Noun 1. PFC - a powerful greenhouse gas emitted during the production of aluminum perfluorocarbon abatement systems, SIMOX See SOI. implanters and other wafer processing equipment. Hitachi High Technologies America is a new company formed in April of this year. Their facility near DFW DFW Dallas/Ft Worth, TX, USA - Dallas Ft Worth International (Airport Code) DFW Department of Fish and Wildlife DFW David Foster Wallace DFW Drug-Free Workplace DFW Down For Whatever (song by Pretty Young Things) airport in Dallas will showcase many of these tools and offer demonstration and process development capabilities. The MC600 was delivered in June to the inspection analysis lab and the facility will be ready to demo equipment later this summer. As device features become smaller and film interfaces more critical, analysis is playing a more significant part in semiconductor technology development and manufacturing. The need to prepare samples quickly and reliably is becoming important for cycle time and productivity in the lab. The new system, the fourth generation of SELA's MC series family of Microcleaving equipment, offers semiconductor manufacturers improved process and yield analysis and a significant increase in overall throughput. SELA's Automated Microcleaving technology helps chipmakers eliminate bottlenecks and shorten cycle times in Failure Analysis labs by reducing SEM sample preparation time to nine minutes. MicroCleaving is a clean, dry and non-contact process. The MC600 offers fully automatic, reliable, and rapid cross sectioning of wafers. |
|
||||||||||||||||||
Printer friendly
Cite/link
Email
Feedback
Reader Opinion