Schlumberger Verification Systems Introduces Critical Shape Metrology, for the Yosemite Ultra Low Voltage CD-SEM.

Business Editors/High-Tech Writers

CONCORD, Mass.--(BUSINESS WIRE)--July 11, 2003

Schlumberger Verification Systems, a unit of Schlumberger Limited, introduced today Critical Shape Metrology(TM)(CSM) for the Yosemite(TM) CD-SEM. This makes Yosemite the world's first CD-SEM able to provide highly accurate 3D shape information. The CSM technique integrates standard measurement data with a physics-based model to provide critical shape information (sidewall profile, feature height, feature width, etc) without inducing sample degradation or compromising system performance in precision or speed. Shape information results have shown as much as a 300% improvement in precision over conventional beam tilt methods, and feature width and sidewall angle accuracy have been correlated through cross-section and AFM analysis. CSM incorporates an approach to CD metrology first developed and demonstrated by Mark Davidson (Spectel Research Corp.) and Andras Vladar (while at HP Labs). This method was later further developed by NIST, partially funded by International Sematech.

Schlumberger is the first manufacturer to unveil a microscope that incorporates this new approach to CD metrology developed at NIST. "We are confident that model-based measurement techniques will enhance the accuracy and repeatability of CD measurements," stated John Villarrubia of the Nano-Scale Metrology Group at the National Institute of Standards and Technology.

Neal Sullivan, director of technology of Schlumberger Verification Systems added, "We believe our collaboration with Spectel Research Corp. and NIST has resulted in measurement capability which, in conjunction with our Ultra Low Voltage(TM) technology, will play a significant role in re-shaping conventional notions about CD metrology. CSM provides the user with highly accurate and repeatable, image-based measurements which do not degrade the fidelity of the feature."

About Yosemite

In February, Yosemite joined the IVS 135 optical CD and Overlay metrology system in Schlumberger Verification Systems' product portfolio. Yosemite incorporates a unique design allowing for measurements at landing energies as low at 100eV. This enables measurements on sensitive materials such as 193nm resist without sample damage or compromise to measurements. The combination of Ultra Low Voltage and Critical Shape Metrology, two features unique to Yosemite, help bring the CD-SEM metrology roadmap squarely in line with that of the future requirements of the ITRS and the sub 75nm nodes.

About Verification Systems

Verification Systems, a business unit of Schlumberger, has been providing state of the art metrology systems to the semiconductor industry for over 17 years. VLSI recently named Verification Systems the #1 process diagnostics company in its 2003 10 Best survey. Additional information is available at http://www.ultralowvoltage.com/.

Yosemite, Ultra Low Voltage and Critical Shape Metrology are trademarks of Schlumberger.