Sarcon and Sarnoff Unveil World's First 320 x 240 MEMS-Based Uncooled Infrared Detector Engine.

Business Editors/High-Tech Writers

KNOXVILLE, Tenn. & PRINCETON, N.J.--(BUSINESS WIRE)--April 22, 2003

Prototype, Images Shown at SPIE Aerosense Conference; On-Chip

Microcantilever Design Capable of Very High Sensitivity

Sarcon Microsystems of Knoxville, which is commercializing a totally new approach to infrared (IR) detectors and cameras, and Sarnoff Corporation, the Princeton-based originator of the color LCD, the CMOS process, and other electronic innovations, today demonstrated the world's first working prototype of a MEMS-based 320 x 240 uncooled IR detector engine.

Images from a camera are also being displayed.

Commercial samples of the proprietary IR detector engine are now expected ship in the first quarter of 2004. The announcement was made at the SPIE Aerosense conference in Orlando, FL.

The new detector engine captures images with an array of heat-sensitive microscopic cantilever elements machined into its surface, one for each pixel. As the elements bend in response to the heat of invisible infrared light, they generate electrical signals to create a thermal image of objects in a scene. This miniaturized assembly represents the first successful application of mechanically active MEMS (micro-electro-mechanical systems) technology to uncooled IR imaging.

"We've now proven the commercial viability of a new technology that can deliver much higher sensitivity at lower cost than competing approaches to uncooled IR sensing," said Don Perrine, President & CEO of Sarcon. "Our new IR detector engine demonstrates that it's possible to fabricate MEMS-based IR imagers at 320 x 240 pixels, the benchmark resolution for most commercial applications.

"I don't use the term 'breakthrough' lightly, but there's no other word for this advance, because it will enable OEM manufacturers of infrared cameras and other devices to improve their performance and lower costs. This will allow more people to purchase IR products for compelling applications such as saving lives in fire fighting, strengthening our security through the military, and improving automobile drivers' vision in fog and adverse conditions."

The detector prototype was produced by Sarnoff, which provides research and MEMS fabrication resources for Sarcon. The Sarnoff foundry had previously produced 16 x 16 arrays with Sarcon for feasibility studies on the new design.

"This is a big step forward, and there's more to come," said Frank Pantuso, Vice President and General Manager at Sarnoff. "As the process matures, and we increase the leverage in the MEMS structure, we'll get progressively better uncooled IR sensitivity, perhaps 10 or 20 times that of the typical IR sensor, which uses temperature-sensitive resistors to image a scene.

"We believe this MEMS IR technology will replace the current uncooled sensors available today."

Uncooled IR cameras can be used in wide variety of applications, from monitoring overheating in equipment and manufacturing processes, to Security and Surveillance night-vision equipment. The Sarcon/Sarnoff MEMS chip can be produced in standard CMOS foundries with conventional processing techniques.