SUCCESSFUL ISEMATECH/NIST EXPERIMENT WITH "SHARP-TIP" EMITTERS USED IN CD-SEM.The value of nano-tips as replacement electron sources in production field emission critical dimension scanning electron microscopes scan·ning electron microscope n. Abbr. SEM An electron microscope that forms a three-dimensional image on a cathode-ray tube by moving a beam of focused electrons across an object and reading both the electrons scattered by the object and (CD-SEMs) is being explored in a two-part study for ISEMATECH. In the first part of the work, an intermediate to the experiments with atomically sharp, nano-emitter tips, a "sharp tip" was placed into the S-6000 CD-SEM CD-SEM Critical Dimension - Scanning Electron Microscopy . The resolution of the CD-SEM improved substantially. These results proved that the expected improvement over the conventional, so-called rounded tip (which is due to smaller tip radius Tip radius is the radius of the circular arc used to join a side-cutting edge and an end-cutting edge in gear cutting tools. Edge radius is an alternate term.1 Notes 1. ANSI/AGMA 1012-G05, "Gear Nomenclature, Definition of Terms with Symbols". ) can be realized as a definite improvement in the resolving power resolving power: see telescope. Resolving power (optics) A quantitative measure of the ability of an optical instrument to produce separable images. of the SEM. The success of this first step presents the prospect of an even better outcome for the nano-tips. ISEMATECH expressed interest in this work and promised further funding. |
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