STMicroelectronics Attains Superior Results Utilizing Copper CMP Waste Treatment Technology from BOC Edwards.

Business Editors

WILMINGTON, Mass.--(BUSINESS WIRE)--April 21, 2004

CuNoSS liquid abatement technology eliminates hazardous copper

ions without requiring solids pre-filtration

BOC Edwards, a major supplier of materials, equipment and services to the semiconductor industry, has successfully completed a wastewater treatment evaluation program with STMicroelectronics (ST), one of the world's leading semiconductor manufacturers. The program demonstrated exceptional results using CuNoSS (copper no suspended solids), an innovative liquid abatement system developed by BOC Edwards that removes copper ions (Cu2+) from copper effluents (which also contain suspended solids, oxidizers and organics).

The four-month evaluation of the copper CMP abatement technology was conducted at ST's Rousset, France site using effluent generated by their 120nm copper process. Evaluation results showed that the BOC Edwards' abatement solution removed copper ions from waste streams to levels below rigorous European environmental regulations without requiring solids pre-filtration. The approach proved to be cost effective and reduced overall water consumption compared to conventional copper CMP abatement technologies.

"This evaluation program was a beneficial exercise for both ST and BOC Edwards," said Chris Case, chief technology officer at BOC Edwards. "The CuNoSS technology has proven itself in a demanding process environment, and will provide an excellent abatement solution for IC manufacturers."

The copper ions in copper CMP effluent streams are biocides, chemical agents capable of destroying living organisms, that have strict government regulated discharge limits. The CuNoSS system utilizes proprietary fluidized bed technology (patent pending) that removes copper ions without trapping the suspended solids. This capability reduces overall wastewater treatment costs because only one solids removal system is required per fab. Furthermore, the system's compact footprint easily fits into existing back pad facilities, which is ideal for IC manufacturers converting to copper. The abatement system is compatible with both copper CMP waste streams and copper electroplating rinse water, and is available in 15-, 30- and 45-gpm facility configurations.

Editor Background

STMicroelectronics is a global leader in developing and delivering semiconductor solutions across the spectrum of microelectronics applications. An unrivalled combination of silicon and system expertise, manufacturing strength, Intellectual Property (IP) portfolio and strategic partners positions the Company at the forefront of System-on-Chip (SoC) technology and its products play a key role in enabling today's convergence markets. The Company's shares are traded on the New York Stock Exchange, on Euronext Paris and on the Milan Stock Exchange. In 2002, the Company's net revenues were $6.32 billion and net earnings were $429.4 million. Further information on ST can be found at www.st.com.

BOC Edwards, part of The BOC Group plc, is a leading supplier of materials, process-enabling subsystems and services to fabs and OEMs involved in the manufacture of microelectronics devices. Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies, with annual sales of over GBP 4.3 billion (more than US $7 billion) in 2003. Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be accessed directly on www.bocedwards.com or e-mail: [e-mail].

NOTE TO EDITORS: In the mention of (Cu2+) in the first paragraph of this release, the 2+ should be in superscript.