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SITE Announces World's Smallest Track System at Semicon West.


Business Editors/High-Tech Writers

SEMICON SEMICON Semiconductors Equipment and Material International Conference  West 2003

Booth 5762

SAN FRANCISCO--(BUSINESS WIRE)--July 14, 2003

SITE Services, Inc., a Silicon Valley manufacturer of advanced semiconductor capital equipment introduces the new Tractrix Tract´rix

n. 1. (Geom.) A curve such that the part of the tangent between the point of tangency and a given straight line is constant; - so called because it was conceived as described by the motion of one end of a tangent line as the
 XP Combo, the world's smallest fully automated spin/coat/develop track system. The Tractrix XP Combo features 0.5 micron technology and offers typical process flows for coat, bake, chill, PEB PEB Physical Evaluation Board
PEB Presidential Emergency Board
PEB Post Exposure Bake
PEB Professional Engineers Board (Singapore)
PEB Pre-Engineered Building
PEB Personal Electronic Ballot
PEB Performance Evaluation Board
 and develop in a compact configuration. Process programs and flows are created and optimized under the intuitive Windows XP graphical user interface graphical user interface (GUI)

Computer display format that allows the user to select commands, call up files, start programs, and do other routine tasks by using a mouse to point to pictorial symbols (icons) or lists of menu choices on the screen as opposed to having to
.

"This new Tractrix XP Combo," reports Alan Kukas, CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. , "is a powerful spin track system in a space saving compact design. The system features easy setups for processing substrates ranging in size from 2" to 200mm and can be equipped with temperature and RH control and amine amine (əmēn`, ăm`ēn): see under amino group.
amine

Any of a class of nitrogen-containing organic compounds derived, either in principle or in practice, from ammonia (NH3).
 filtration for use with chemically amplified resist. There is also a unique wafer handling feature that is perfect for working with fragile substrates."

At nearly half the cost and size of comparable systems, the Tractrix XP Combo has an exceptionally small footprint of 19" x 82". Visit SITE Services at the Semicon West show - Booth 5762.

About SITE Services, Inc.

With 20 years of experience, SITE Services, Inc. is dedicated to the innovative design, manufacture and marketing of flexible, cost-effective automated wafer processing equipment for the global semiconductor industry. SITE Services, Inc.'s corporate headquarters are located at: 690 Aldo Avenue, Santa Clara, CA 95054-2207 USA Tel: 408-980-1155, Fax: 408-980-1267, e-mail: sales@site.com, web: www.site.com
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Publication:Business Wire
Date:Jul 14, 2003
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