Qcept Technologies Delivers First Scanning Chemical Metrology Tool to Semiconductor Industry, Announces First Customer of Chemetriq Wafer Surface Analysis Tool.Business Editors/High-Tech Writers SEMICON SEMICON Semiconductors Equipment and Material International Conference West 2004 Booth # 2968 ATLANTA--(BUSINESS WIRE)--May 12, 2004 Qcept Technologies Inc. announced today that it has installed its first Chemetriq(TM) rapid chemical metrology metrology Science of measurement. Measuring a quantity means establishing its ratio to another fixed quantity of the same kind, known as the unit of that kind of quantity. tool at DuPont EKC Technology in Hayward CA. The Chemetriq tool uses patented scanning Contact Potential Difference Imaging (CPDI) to detect and map subtle chemistry variations across the wafer (1) A small, thin continuous-loop magnetic tape cartridge that has been used from time to time for data storage and specialized applications. (2) The base unit of chip making. It is a slice taken from a salami-like silicon crystal ingot up to 12" (300mm) in diameter. surface. Early applications of the tool are Cu CMP CMP (cytidine monophosphate): see cytosine. (1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information and wafer clean process development and monitoring. The tool can scan an entire 8" wafer in less than 5 minutes and is sensitive to sub-monolayer amounts of surface contamination. "The combined challenges of lower-k dielectric materials Dielectric materials Materials which are electrical insulators or in which an electric field can be sustained with a minimal dissipation of power. Dielectrics are employed as insulation for wires, cables, and electrical equipment, as polarizable media for , sub-130nm features, and copper metallization Met`al`li`za´tion n. 1. The act or process of metallizing. are pushing both suppliers and chip makers to continue to find new forms of metrology and inspection that provide critical information for process development and control," noted Dr. Michael A. Fury, vice president of R&D and engineering, DuPont EKC Technology. "Qcept's Chemetriq tool delivers a combination of speed, sensitivity, and ease of use for wafer surface inspection that holds great promise for EKC's mission to deliver next generation process cleaning solutions and other wafer surface preparation processes." Allen Vance, Qcept Senior Vice President, remarked, "Today is a significant milestone for Qcept in addressing the gap in metrology between inline optical tools and offline analytical instruments. Our Chemical Metrology tools provide the first rapid, full-wafer analysis capability with single atomic layer sensitivity available to the industry. We are excited to work with EKC Technology and our other partners to further apply our technology to meet the industry's challenges for process development and control." Qcept's Chemetriq Wafer Surface Analysis tool is now generally available, and will be demonstrated July 12-14 at SEMICON West 2004, Moscone Hall, San Francisco San Francisco (săn frănsĭs`kō), city (1990 pop. 723,959), coextensive with San Francisco co., W Calif., on the tip of a peninsula between the Pacific Ocean and San Francisco Bay, which are connected by the strait known as the Golden , Booth # 2968. About Qcept Technologies Inc. Qcept delivers Chemical Metrology solutions for the detection, inspection, and measurement of chemical variation and uniformity on semiconductor wafers wafers compressed roughage in flat plates useful for feeding to animals in transit. . The breakthrough technology enables single atomic layer sensitivity on surfaces. Qcept's Chemical Metrology solution is being adopted in Copper CMP and other processes for in-line, non-contact, full-wafer inspection and rapid analysis to increase yield. For more information, call (404) 685-9434, email info@qceptech.com or visit www.qceptech.com. Chemetriq is a trademark of Qcept Technologies Inc. |
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