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Praxair Chemax Semiconductor Materials Commissions First Silane Transfill in Taiwan.


Business Editors

DANBURY, Conn.--(BUSINESS WIRE)--Aug. 19, 2002

Praxair, Inc. (NYSE NYSE

See: New York Stock Exchange
: PX) announced today that Praxair Chemax Semiconductor Materials Semiconductor materials are insulators at absolute zero temperature that conduct electricity in a limited way at room temperature (see also Semiconductor). The defining property of a semiconductor material is that it can be doped with impurities that alter its electronic properties  Co., Ltd., the company's joint venture with China Petrochemical Development Co., (Taiwan), has commissioned the first silane silane
 or silicon hydride

Any of a series of inorganic compounds of silicon and hydrogen with covalent bonds and the general chemical formula SinH(2n + 2).
 (SiH4) transfill facility in Taiwan.

The facility was commissioned in May 2002 and has been operational since June 1. This fully automated facility will house an industry-leading analytical lab and will transfill high grade SiH4 for Praxair Chemax's customers in Taiwan and all over Asia.

TFT-LCD TFT-LCD Thin Film Transistor - Liquid Crystal Display  (Thin Film Transistor-Liquid Crystal Display) manufacturers use silane throughout the array process. In addition, silane is used in the chemical vapor deposition Vapor deposition

Production of a film of material often on a heated surface and in a vacuum. Vapor deposition technology is used in a large variety of applications.
 (CVD CVD Cardiovascular disease, see there ) of silicon dioxide silicon dioxide: see silica.


(SiO2) A hard, glassy mineral found in such materials as rock, quartz, sand and opal. In MOS chip fabrication, it is used to create the insulation layer between the metal gates of the top layer and the silicon elements below.
, silicon nitride insulating layer or amorphous semiconductor layer.

The transfill systems will provide Praxair's customers in Taiwan with a solid source of high-purity 6.0 grade silane. By providing local transfilling support to semiconductor and TFT-LCD manufacturers in Taiwan, Praxair Chemax can ensure a more reliable and cost-effective means of distribution.

"Praxair is pleased to be the first to offer a local supply of silane to our customers in Taiwan. We will continue to expand our facilities in Asia to better serve the Asian semiconductor manufacturing industry" states Frank Crespo, vice president of semiconductor gases and services for Praxair Electronics.

About Praxair Chemax Semiconductor Materials

Praxair Chemax Semiconductor Materials Co., Ltd (Praxair Chemax) is a joint venture between Praxair, Inc. and China Petrochemical Development Corporation. Headquartered in Jubei, Taiwan, with a warehouse in Toufen, Taiwan, Praxair offers a complete gas, chemical, and delivery system solution to semiconductor manufacturers. Located near Hsinchu Science Based Park, we provide our customers with high purity gases and safe, reliable specialty gases and gas delivery systems. Praxair Chemax is continuing to expand its product and services portfolio, which includes a 6.5 grade ammonia, a high flow bulk ammonia system, sputtering A popular method for adhering thin films onto a substrate. Sputtering is done by bombarding a target material with a charged gas (typically argon) which releases atoms in the target that coats the nearby substrate. It all takes place inside a magnetron vacuum chamber under low pressure.  targets and spare parts and consumables management. The offering provides the semiconductor industry an integrated source for process gases, materials supply and related equipment. www.praxair.com/semiconductor.

About Praxair, Inc.

Praxair is the largest industrial gases company in North and South America, and one of the largest worldwide, with 2001 sales of $5.1 billion. The company produces, sells and distributes atmospheric and process gases, and high-performance surface coatings. Praxair products, services and technologies bring productivity and environmental benefits to a wide variety of industries, including aerospace, chemicals, food and beverage F&B is a common abbreviation in the United States and Commonwealth countries, including Hong Kong. F&B is typically the widely accepted abbreviation for "Food and Beverage," which is the sector/industry that specializes in the conceptualization, the making of, and delivery of foods. , electronics, energy, healthcare, manufacturing, metals and others. More information on Praxair is available on the Internet at www.praxair.com.
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Comment:Praxair Chemax Semiconductor Materials Commissions First Silane Transfill in Taiwan.
Publication:Business Wire
Geographic Code:9TAIW
Date:Aug 19, 2002
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