Powerchip Orders Nikon Immersion Scanner for Next-Generation Memory Line.Major Taiwanese Memory Manufacturer Selects Nikon BELMONT, Calif. -- Nikon Precision announced its NSR-S610C ArF immersion scanner has been selected by Powerchip Semiconductor Powerchip Semiconductor is a maker of DRAM memory chips and other semiconductor chips. Powerchip also sells foundry services to other firms. The company was founded in 1994 at Hsinchu Science Park in Taiwan. It has four fabrication lines, three of which handle 300mm silicon wafers. Corporation as the leading edge tool for its 50 nm NAND flash See flash memory. process. The tool will be installed in Powerchip's fab in Hsinchu, Taiwan. This system was selected over the competition because of Nikon's proven ability to print immersion exposures with no immersion-induced defects and overlay accuracy equivalent to or better than dry systems. "We are pleased that Powerchip selected us as their supplier for immersion lithography Immersion lithography is a photolithography resolution enhancement technique that replaces the usual air gap between the final lens and the wafer surface with a liquid medium that has a refractive index greater than one. technology," said Kazuo Ushida, President of Nikon Precision Equipment Company. "This continues our strong, existing relationship with Powerchip for both leading edge tools and non-critical layer lithography." The NSR-S610C builds on the immersion technology developed for the NSR-609B, the world's first production immersion tool, shipped in January of 2006. Nikon's proprietary Local Fill Technology is proven to eliminate scanner-induced immersion defects with no bubbles, water spots, or backside wafer contamination. This technology also eliminates evaporation of the immersion fluid, providing a critical advantage in preventing immersion related overlay problems. The Nikon Tandem Stage utilizes two stages with different functions to increase throughput, improve accuracy, and enhance long-term stability The long-term stability of an oscillator, the degree of uniformity of frequency over time, when the frequency is measured under identical environmental conditions, such as supply voltage, load, and temperature. . The NSR-610C, with its catadioptric cat·a·di·op·tric adj. Of or relating to an optical system that uses both reflective and refractive optical devices. catadioptric optics of NA 1.3, is the world first immersion scanner capable of 45 nm half-pitch volume production. About Nikon: Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,800 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time (LCD) and thin-film magnetic head (TFH TFH Technische Fachhochschule (German: Engeneering College/University) TFH 24 Hours (Movie) TFH Thread from Hell (newsgroups) TFH Tinfoil Hat TFH Thanks For Helping ) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America. For more information about Nikon, access our web site at: http://www.nikonprecision.com. |
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