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Photonic MEMS Devices; design, fabrication, and control.


Photonic MEMS Devices; design, fabrication, and control.

Liu, Ai-Qun et al.

CRC / Taylor & Francis


483 pages




This work describes the fundamental knowledge needed to integrate photonic MEMS devices into commercial products and technology. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. It describes a range of optical and photonic devices, including MEMS optical switches, bandgap crystal switches, optical variable attenuators, and injection locked tunable lasers. The book deals rigorously with these technologies at a fundamental level, and introduces essential nomenclature. Each chapter includes an introduction to basic concepts, analysis techniques with equations, research case studies, experimental results, and discussions. Liu teaches microelectronics at Nanyang Technological University.

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Publication:SciTech Book News
Article Type:Book review
Date:Mar 1, 2009
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