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PMT SIGNS CONTRACT WITH CANON AND ALCAN-TECH FOR HIGH DENSITY PLASMA ETCHING

 PMT SIGNS CONTRACT WITH CANON AND ALCAN-TECH
 FOR HIGH DENSITY PLASMA ETCHING
 BURBANK, Calif., Dec. 2 /PRNewswire/ -- Plasma and Materials Technologies Inc. (PMT) announced today the signing of a contract with Canon Sales and Alcan-Tech to incorporate PMT's MORI (TM) plasma etch technology into a new etch tool being developed by Alcan-Tech. Canon Sales will distribute the equipment in Japan.
 The agreement includes the sale of multiple units of PMT's patented MORI plasma source systems to Canon Inc. Three of the units shipped immediately on signing of the contract. Canon plans to display a new dry etch tool which features MORI technology at Semicon Japan in Tokyo this week.
 In addition, the contract involves joint process development which will take place at PMT's California facility and at Canon's applications laboratory in Japan.
 PMT's MORI technology offers a dramatic advance in low pressure plasma etching. The MORI source is a helicon wave plasma source that delivers a high density plasma at low pressure, with a high degree of uniformity over a large area. The plasma density can be an order of magnitude higher than electron cyclotron resonance (ECR) and operates at 13.56 MHz and low magnetic field.
 The process being developed will be used for advanced semiconductor manufacturing of 16- and 64-megabit memory devices and beyond. It will be especially useful with design rules requiring sub-0.5 micron geometries.
 Commented Michael W. McCann, PMT's vice president of sales and marketing, "The technology being developed will replace ECR as the leading technology candidate for next-generation etch applications. Our customers have expressed a preference for MORI technology over ECR not only because of MORI's technical advantages, but also because of its relatively simple architecture and compactness."
 "We are very pleased to be working with Canon," said Dr. Gregor A. Campbell, PMT's president. "Over the past five months we have generated very impressive etch results. We feel that given the benefits of the technology and the strength of Canon as a partner, we will be able to make a significant impact in the Japanese market."
 Plasma and Materials Technologies Inc. serves the semiconductor industry through the manufacture of plasma diagnostic instruments and plasma sources. PMT focuses on plasma processing technology and is heavily involved in continuing research and development into advanced plasma etch techniques.
 -0- 12/2/91
 /CONTACT: Michael McCann, VP-sales and marketing of Plasma and Materials Technologies, 818-841-4094/ CO: Plasma and Materials Technologies Inc. ST: California IN: CPR SU: CON


KJ -- LA007 -- 8325 12/02/91 11:56 EST
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Publication:PR Newswire
Date:Dec 2, 1991
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