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PLASMA-THERM TO SPIN-OFF RF PLASMA PRODUCTS

 PLASMA-THERM TO SPIN-OFF RF PLASMA PRODUCTS
 VOORHEES, N.J., Jan. 22 /PRNewswire/ -- Ronald H. Deferrari,


chairman of Plasma-Therm, Inc. (NASDAQ: PTIS), announced today that it intends to spin-off its wholly owned subsidiary, RF Plasma Products (RFPP), on a tax-free basis to Plasma-Therm shareholders.
 Each Plasma-Therm shareholder of record, on the record date to be established for the spin-off, will receive a pro-rata share of stock of RFPP. After the spin-off, which is expected to occur during May or June, RFPP will be a separate, publicly owned company, and Plasma-Therm will not retain any ownership of RFPP. The boards of RFPP and Plasma- Therm will have no overlapping directors.
 RF Plasma Products manufactures a diversified line of high performance radio frequency (RF) power generators and accessories to a multifaceted customer base. RFPP's power systems are used in plasma deposition and etching manufacturing equipment for the semiconductor industry, commercial coating equipment for applications such as compact disks, magnetic head and optical and architectural glass, as well as the analytical market which utilizes Inductively Coupled Plasma (ICP) sources for mass spectroscopy.
 RFPP, located in Voorhees, has been operating as a subsidiary of Plasma-Therm since 1981 and posted sales of approximately $7.3 million in the fiscal year ending Nov. 30, 1991. Management said it believes that the separation of RFPP from Plasma-Therm will enhance RFPP's efforts to penetrate the RF power systems OEM market. RFPP's relationship with Plasma-Therm presented a hurdle to RFPP's attracting other semiconductor equipment manufacturers as customers, the company said.
 Upon consummation of the spin-off, Dr. Joseph Stach, who was appointed president of RFPP in July 1991, is expected to serve as chairman of the board, chief executive officer and president of RFPP. Stach has been active in the microelectronics industry and currently serves as a director of Semiconductor Equipment and Materials International (SEMI), the worldwide industry trade association.
 /delval/
 -0- 1/22/92
 /CONTACT: Dennis Dribin of Plasma-Therm, 609-767-6120/
 (PTIS) CO: Plasma-Therm, Inc.; RF Plasma Products ST: New Jersey IN: SU:


CC-KA -- PH029 -- 2384 01/22/92 14:14 EST
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Date:Jan 22, 1992
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