Olympus-ITA Wafer Receives First Order from Large U.S. IDM for Inspection and Defect Review Systems.

SAN JOSE, Calif. -- Olympus Integrated Technologies America (ITA), a subsidiary of Olympus Corporation of Japan, known for high quality semiconductor systems and software for wafer inspection and defect review, announced that they have received the first order from a large U.S. integrated device manufacturer (IDM) for multiple units of Olympus' 300mm wafer inspection and defect review systems. The company selected the Olympus systems to take advantage of Olympus's broad capabilities and flexible high resolution DUV platforms.

"This customer will utilize our capable and flexible systems in various configurations to meet their requirements for inspection and defect review throughout the fab, from photo to the test floor," said Olympus ITA president Greg Baker. "We can offer the customer broad capability and flexibility in system configurations on a common platform, giving the customer a very cost effective solution for a variety of applications within the fab."

The purchase includes multiple units of both the AL3100 inspection and review station and FR3200 DUV automated defect review station. The AL3100 combines inspection, defect review, wafer ID verification, and wafer sorting capability all in one tool. It delivers front and back side macro as well as micro wafer inspection and defect review in one pass.

The FR3200 is an automated defect review station that provides visible and DUV imaging with resolution to 80 nanometers. Extended Focus Imaging software provides greater depth of focus at high magnifications, while high accuracy staging ensures accurate defect relocation. Both systems are GEM300 compliant.

About Olympus-Integrated Technologies of America

Olympus Integrated Technologies, Inc. (ITA) was founded in March 2000 as a wholly owned subsidiary of Olympus Corporation, Tokyo, Japan. Specializing in semiconductor products and systems for wafer inspection and defect review, Olympus-ITA is the application software development R&D center for Olympus semiconductor products. Its location in San Jose, California, enables the company to respond quickly to provide sales, service, and support to semiconductor companies throughout the United States. For more information contact Greg Baker at 408-514-3918, email [e-mail], or visit our website at www.olympus-ita.com.