New Partnership Paves the Way for Cost Effective Production of Wafer-Level CSPs.

Business Editors/High-Tech Writers

MUNICH, Germany--(BUSINESS WIRE)--May 16, 2000

Karl Suss and Image Technology Inc. have entered into a strategic partnership to further develop and standardize 9-inch masks for high volume wafer bumping and wafer-level chip scale packaging production.

As part of the agreement, Karl Suss and Image Technology will define quality standards for 9-inch precision photomasks and qualify 9-inch soda lime masks in high volume production. This will allow the companies to identify opportunities for photolithography related cost reductions without sacrificing performance. Full field exposure of 8-inch wafers requires 9-inch x 9-inch masks with semiconductor-level accuracy, which are a key enabling technology in the packaging process.

"With today's wafer-level CSP technology, the advanced packaging industry is quickly moving into high-volume production of 200 mm wafers," explained Dr. Dietrich Tonnies, product manager mask aligners for Suss. "The cooperation between both companies will lead to further standardization of full field exposure of 9-inch masks for 8-inch wafers and secure the availability of these masks to the packaging industry."

The joint development work will also seek to establish specifications and define parameters such as critical dimension uniformity and tolerances, layer-to-layer registration, data placement accuracy, defect criteria and material flatness requirements.

"The emergence of sophisticated handheld RF devices which combine broadband data communication, telecommunication and power computing through wireless access to the internet have fueled demand for leading-edge packaging technology," said James A Quinn, vice president of Image Technology. "Our companies' combined experience in photomask technology and lithography equipment will allow us to develop high-performance, but less expensive, solutions for the advanced packaging industry."

About Image Technology

Image Technology Inc. manufactures and markets complex precision photomasks. Photomasks are an enabling technology used in the manufacture of microelectronics that contain precision master patterns of complex designs and are used to transfer the precise images onto a wafer or substrate. Since 1963, Image Technology has been a supplier of precision photomasks. The company continues to set the pace with on-going equipment acquisitions, human resource development and facility enhancements. Image Technology is headquartered in Palo Alto, Calif., USA. Image Technology can be found on the world wide web at http://www.image-tec.com.

About Karl Suss

Karl Suss is a global supplier of manufacturing equipment and process technology for advanced packaging, MEMS and microelectronics market. With over 6,000 systems installed, SUSS products include coating and developing systems, proximity lithography systems, substrate bonders, flip chip bonders and probe systems. Headquartered in Munich/Germany, Suss operates 9 manufacturing, sales and service centers in North America, Europe, Asia and Japan. To learn more about Karl Suss and its full line of products, please visit the company's web site at www.suss.com or www.suss.de.