New Monochromated ZEISS LIBRA(R) Transmission Electron Microscope Enables Unrivalled Spectroscopic Imaging.
FORT LAUDERDALE, Fla. -- Following a series of successful system installations at international evaluation and co-development partners, Carl Zeiss SMT officially introduces its world-wide unique monochromator module (MC) for its LIBRA([R]) 200 kV TEM series systems. The highly innovative and patent protected ZEISS monochromator enables the reduction of the energy width of primary electrons to less than 0.2 eV and thereby allows for highest resolution Electron Energy Loss Spectroscopy (EELS). The proprietary ZEISS monochromator combines this substantial reduction in electron energy spread with the capability to form a highly focused and especially bright spot in a unique way. Already installed LIBRA([R]) 200 EFTEM systems can be retrofitted with the new monochromator module.
Outstanding analytical capabilities
Especially when it comes to Electron Energy Loss Spectroscopy (EELS), the new monochromator module significantly improves the resolution of fine structures of elemental absorption edges. Combined with another proprietary module of ZEISS' high-end TEM series, the in-column Omega Energy Filter of the LIBRA([R]) 200 EFTEM, this allows the user to fully exploit the enhanced elemental resolution by a simple push-button operation. Thereby, the monochromated LIBRA([R])200 MC opens up new dimensions in compositional and structural analysis of advanced materials in all major disciplines of atomic-resolution analysis and characterization.
Intrinsic advantages of monochromated 200 kV accentuated
The rapidly growing adoption of corrector technologies for high-end TEM is not accidental. In many applications users had to compromise between the destructive effects of high acceleration voltage and achievable resolution. This compromise is no longer necessary with corrector technologies becoming commercially available. Together with its partners, during the past years Carl Zeiss SMT's Nano Technology Systems Division has developed monochromator, corrector and energy filter technologies up to a daily-use, non-expert maturity state. Only recently the one-of-a-kind CRISP system (for Corrected Illumination Scanning Probe) from Carl Zeiss SMT has been inaugurated at the research center caesar in Bonn (Germany). The CRISP system combines the new monochromator module from ZEISS with a corrector module to form the smallest available sample illumination spot, achieving unprecedented performance at monochromated 200 kV in Scanning Transmission Electron Microscopy (STEM) mode.
About Carl Zeiss SMT AG
Carl Zeiss SMT utilizes its globally leading know-how in light, electron and ion-optical technologies to offer its customers in the manufacturing industry and R&D a broad portfolio of products, services and application solutions. The market-leading systems and solutions from Carl Zeiss SMT are used in mutually strengthening fields of application in nanotechnology such as semiconductor technology, materials research and the life sciences. The global customer community is constantly growing.
As the innovation leader for lithography optics, as well as optical and particle-beam based inspection, analysis and measuring systems, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and university R&D. Together with its subsidiaries in Germany, England, France and the USA, the international group of companies has approximately 2,400 employees.
In fiscal year 2005/06, Carl Zeiss SMT AG generated revenues of over EUR 860 million. Carl Zeiss SMT AG is a wholly owned subsidiary of Carl Zeiss AG. Visit http://www.smt.zeiss.com for additional information.