New MaxAktiv Product Line Launched by Integrated Dynamics Engineering.WOBURN, Mass.--(BUSINESS WIRE)--July 29, 1997-- IDE Offers a Complete Family of Active Vibration Isolation Systems for Semiconductor Lithography and Metrology Applications Integrated Dynamics Engineering (IDE), a global leader in the design and production of vibration isolation systems for semiconductor lithography and metrology applications has unveiled MaxAktiv(tm), a comprehensive new family of active vibration control Active vibration control is the active application of force in an equal and opposite fashion to the forces imposed by external vibration. With this application, a precision industrial process can be maintained on a platform essentially vibration-free. systems featuring both feedback and feedforward feedforward /feed-for·ward/ (fed-for´ward) the anticipatory effect that one intermediate in a metabolic or endocrine control system exerts on another intermediate further along in the pathway; such effect may be positive or negative. technologies that virtually eliminate vibration in X-Y moving stages. For semiconductor lithography, MaxAktiv systems enable OEMs to move greater masses, at faster speeds, with incredibly shorter settling times, to achieve record-breaking throughput. For metrology, MaxAktiv technology delivers unprecedented stability and greater resolution in far less time than previously possible. Featured in the MaxAktiv family debut from IDE are four major series of products: TCN TCN Tetracycline TCN transparent content negotiation TCN Third Country National(s) TCN Topology Change Notification TCN Transportation Control Number TCN Train Communication Network TCN Transaction Control Number , ETC ETC - ExTendible Compiler. Fortran-like, macro extendible. "ETC - An Extendible Macro-Based Compiler", B.N. Dickman, Proc SJCC 38 (1971). , PTCA PTCA abbr. percutaneous transluminal coronary angioplasty PTCA Percutaneous transluminal coronary angioplasty, see there , and ATC ATC Air Traffic Control ATC Average Total Cost ATC Certified Athletic Trainer ATC At the Center (Hartford, Maine retreat center) ATC Applied Technology Council ATC All Things Considered . In addition, three new "brains" for these active systems, the digital signal processor A digital signal processor (DSP) is a specialized microprocessor designed specifically for digital signal processing, generally in real-time computing. Characteristics of typical Digital Signal Processors
Each series in the new MaxAktiv family (which many industry insiders are calling "the most stable family in the world") is designed to meet the highly specialized vibration isolation needs and budget requirements of a broadg-mounted or piezoelectric The property of certain crystals that causes them to produce voltage when a mechanical pressure is applied to them such as sound vibrations. This technique is used to build crystal microphones, phonograph cartridges and strain gauges, all of which turn mechanical movement into voltage. active vibration conTCN Series, with active electronic vibration conthography applicat ions, the ATC Series aggressively pushes the performance envelope in the milliHerz frequency range. Another important feature of the MaxAktiv family is its modular configuration. This flexibility built into the MaxAktiv concept provides a matrix of solutions to fit virtually every OEM's requirements in semiconductor lithography and metrology. According to Peter Heiland, president and founder of IDE, "Our MaxAktiv family is the result of years of working closely with OEM customers focused on semiconductor lithography and metrology. We saw their needs first hand and answered the challenge with MaxAktiv technology. Our unique feedforward techniques and broad price/performance range make IDE well positioned for the 300mm revolution." IDE, leaders in environmental disturbance controls, has headquarters in North America near Boston and European headquarters outside Frankfurt, Germany, along with sales offices or representatives worldwide. For more information on IDE and the new MaxAktiv family, visit the IDE home page at http://www.ideworld.com CONTACT: Integrated Dynamics Engineering Bob Jaczko, (617) 938 5120 |
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