New Filter from Entegris Enables Advanced Copper Processes.Guardian[TM] ECD ECD Early Childhood Development ECD Electron Capture Detector ECD Energy Citations Database ECD Executive Creative Director (advertising) ECD Ethyl Cysteinate Dimer ECD Electron Capture Dissociation ECD Electronic Civil Disobedience filter's inert membrane provides longer life and superior retention CHASKA, Minn. -- The new Guardian[R] family of high-flow cartridge filters from Entegris, Inc. (Nasdaq:ENTG) is designed to be non-reactive to a wide range of plating additives and provide superior particle retention capability and longer life. Guardian ECD filter cartridges are ideal for high-purity electrochemical electrochemical /elec·tro·chem·i·cal/ (-kem´i-k'l) pertaining to interaction or interconversion of chemical and electrical energies. e·lec·tro·chem·i·cal adj. deposition processes, such as copper, nickel, and gold plating For other uses, see Gold plating (disambiguation). Gold plating is a method of depositing a thin layer of gold onto the surface of another metal, most often copper or silver, by chemical or electrochemical means. . "The Guardian ECD filters can enable today's leading edge processes with reduced cost through its proprietary membrane technology," said Chad Ruwe, Entegris vice president, Liquid Microcontamination Control Business. Guardian ECD filters use an optimized membrane pore structure and feature proprietary PolySulfone (PES pes (pes) pl. pe´des [L.] 1. foot. 2. any footlike part. pes n. pl. pe·des 1. The foot. 2. ) membranes that will not react to a variety of plating bath additives, thereby eliminating effects that can compromise process quality. This unique hydrophilic hydrophilic /hy·dro·phil·ic/ (-fil´ik) readily absorbing moisture; hygroscopic; having strongly polar groups that readily interact with water. hy·dro·phil·ic adj. membrane reduces the occurrence of micro-bubble formation during wafer processing, a significant contributor to wafer defects. The Guardian ECD filter cartridge, which is available in 0.1[acute accent acute accent n. A mark (´) indicating: a. that a vowel is close or tense, as é in French été. b. that a vowel or syllable has a high or rising pitch, as in Chinese or Ancient Greek. c. ]m-0.05[acute accent]m pore sizes, are compatible with most housings, are quick to install, and do not require any pre-wetting or flushing procedures for quick startups. The high filter area and optimized flow design also help extend service life and reduce downtime associated with replacement. The filters offer a maximum operating temperature range to 60[bar]C (140[bar]F). ABOUT ENTEGRIS Entegris (merged with Mykrolis in August 2005) is the global leader in materials integrity management - delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO (1) See ISO speed. (2) (International Organization for Standardization, Geneva, Switzerland, www.iso.ch) An organization that sets international standards, founded in 1946. The U.S. member body is ANSI. 9001-certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com. |
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