National Institute of Advanced Industrial Science and Technology, Toyama University Develop Nano-machine Processing System That Works Inside Scanning Electron Microscope.Tokyo, Japan, Mar 14, 2006 - (JCN) - The Fine Factory Research Group of the National Institute of Advanced Industrial Science and Technology The National Institute of Advanced Industrial Science and Technology (産業技術総合研究所 (AIST) and a Toyama University research group have jointly developed a nano-machine processing system that works inside a scanning electron microscope scan·ning electron microscope n. Abbr. SEM An electron microscope that forms a three-dimensional image on a cathode-ray tube by moving a beam of focused electrons across an object and reading both the electrons scattered by the object and (SEM). The joint research groups have successfully captured on video how the system cuts monocrystal silicon. The system employs the mechanism of the atomic force microscope atomic force microscope (AFM), device that uses a spring-mounted probe to image individual atoms on the surface of a material. Unlike the scanning tunneling microscope, which is also a scanning probe microscope, the AFM can be used on materials that do not conduct (AFM (Atomic Force Microscope) A device used to image materials at the atomic level. AFMs are used to solve processing and materials problems in electronics, telecom, biology and other high-tech industries. ) and uses a microfabricated cantilever as a cutting tool. By altering loads at the tip of the cantilever that contacts the silicon surface, the system can control groove depth within a range of 1 to 100nm. Through direct observation of this process, researchers are able to obtain detailed information on how materials are removed and identify optimal processing conditions. The latest technology is expected to speed up the commercial development of nanofabrication nan·o·fab·ri·ca·tion n. Any technique used to create objects or mechanisms on the scale of nanotechnology. technology. Copyright [c] 2006 Japan Corporate News Network. All rights reserved. |
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