Nanolithography system. (Hardware/Software).

An advanced nanolithography and manipulation feature, MicroAngelo, comes standard with the company's MFP-3D AFM systems. MicroAngelo's precision and accuracy are derived from three powerful features inherent in the MFP-3D system, including the fully-digital controller, Igor Pro software and the patent-pending Nanopositioning System, according to the company. The NPS' sensored, closed loop operation in all three axes is said to provide sub nanometer resolution over the entire 100 [micro]m scan range with noise levels that are said to be the lowest in the industry. This is said to allow repeatable imaging, quantitative feature measurement, reliable and accurate imaging offsets and quantitative positioning for manipulation and lithography, according to the company. With MicroAngelo, nanolithography images can be easily imported from a variety of other programs or generated within the software environment itself. Imported images are converted into a series of contour lines which are then scaled and used to drive the scanner to create the lithographic image. The scanner can be manipulated using a variety of pointing interfaces, including a mouse or stylus pad. (Asylum Research, 341 Bollay Dr., Santa Barbara, CA 93117)

Circle 107 on card