NIST CONDUCTS WAFER FLATNESS WORKSHOP.Nearly 30 representatives from wafer-manufacturing and instrument-making companies attended a 1 day workshop on wafer flatness metrology metrology Science of measurement. Measuring a quantity means establishing its ratio to another fixed quantity of the same kind, known as the unit of that kind of quantity. at NIST (National Institute of Standards & Technology, Washington, DC, www.nist.gov) The standards-defining agency of the U.S. government, formerly the National Bureau of Standards. It is one of three agencies that fall under the Technology Administration (www.technology. in January 2001. An industry representative set the tone for the meeting with a presentation "Industry Needs to 2014." The clear message from his presentation, was that acceleration ahead of the roadmap leaves wafer suppliers facing specifications for which traceable metrology does not exist. Subsequent presentations reviewed the results of round robins sponsored by the American Society for Testing and Materials (ASTM ASTM abbr. American Society for Testing and Materials ) and SEMATECH SEMATECH Semiconductor Manufacturing Technology showing large divergence divergence In mathematics, a differential operator applied to a three-dimensional vector-valued function. The result is a function that describes a rate of change. The divergence of a vector v is given by between optical- and capacitance-based methods. NIST scientists described NIST capabilities and current developments in interferometric measurement methods and also presented an overview of the different types of NIST measurement results that may be reported. After the presentations, a spirited 2 hour debate left no doubt about the industry need for better measurements--and ended with the industry group inviting themselves back for an update on NISTs progress in September. |
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