NEW EXCIMER LASER MEASUREMENT SERVICE AVAILABLE.NIST (National Institute of Standards & Technology, Washington, DC, www.nist.gov) The standards-defining agency of the U.S. government, formerly the National Bureau of Standards. It is one of three agencies that fall under the Technology Administration (www.technology. recently has developed a new excimer laser measurement service for small-area detectors like those used in high-resolution semiconductor photolithography systems, and other excimer laser applications. NIST now has the capability to accurately measure pulse-energy density of deep ultraviolet radiation produced by excimer lasers; this new capability is being used to provide dose (i.e., energy density) measurement services. NIST offers absolute responsivity calibrations of laser dose meters at the laser wavelength of 193 nm. Additional excimer laser wavelengths will be added to this service in the near future. The dose measurements are performed using a beam-splitter-based calibration system in which a spatially uniform beam from an argon-fluoride excimer laser is generated using a special beam homogenizer. The beam propagation properties, including uniformity or homogeneity, are fully characterized with a state-of-the-art beam profile measurement system based on a pyroelectric py·ro·e·lec·tric adj. Relating to or exhibiting pyroelectricity. n. A pyroelectric material. Adj. 1. pyroelectric - relating to or exhibiting pyroelectricity pyroelectrical camera array. This uniform beam then is used to irradiate irradiate /ir·ra·di·ate/ (i-rad´e-at) to treat with radiant energy. ir·ra·di·ate v. 1. To expose to radiation, as for diagnostic or therapeutic purposes. 2. a NIST-calibrated aperture placed immediately in front of the test detector. Measurement traceability for these calibrations comes from an electrically calibrated cal·i·brate tr.v. cal·i·brat·ed, cal·i·brat·ing, cal·i·brates 1. To check, adjust, or determine by comparison with a standard (the graduations of a quantitative measuring instrument): , primary standard calorimeter calorimeter: see calorimetry. calorimeter Device for measuring heat produced during a mechanical, electrical, or chemical reaction and for calculating the heat capacity of materials. developed by NIST. |
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