NEW EXCIMER LASER MEASUREMENT SERVICE AVAILABLE.NIST recently has developed a new excimer laser A gas laser in which a very short electrical pulse excites a mixture containing a halogen such as fluorine and a rare gas such as argon or krypton. It produces a brief, intense pulse of ultraviolet light. The output of an excimer laser is used for writing patterns on semiconductor chips, because the short wavelength can write very fine lines. In fiber optics, it is used to write fiber Bragg gratings. measurement service for small-area detectors like those used in high-resolution semiconductor photolithography systems, and other excimer laser applications. NIST now has the capability to accurately measure pulse-energy density of deep ultraviolet radiation UV index predicts how long it would take a light-skinned American to get a sunburn if exposed, unprotected, to the noonday sun, given the geographical location and the local weather. It ranges from 1 (about 60 minutes before the skin will burn) to a high of 10 (about 10 minutes before the skin will burn). A small amount of sunlight is necessary for good health. produced by excimer lasers; this new capability is being used to provide dose (i.e., energy density) measurement services. NIST offers absolute responsivity calibrations of laser dose meters at the laser wavelength of 193 nm. Additional excimer laser wavelengths will be added to this service in the near future. The dose measurements are performed using a beam-splitter-based calibration system in which a spatially uniform beam from an argon-fluoride excimer laser is generated using a special beam homogenizer. The beam propagation properties, including uniformity or homogeneity Homogeneity The degree to which items are similar., are fully characterized with a state-of-the-art beam profile measurement system based on a pyroelectric camera array. This uniform beam then is used to irradiate a NIST-calibrated aperture placed immediately in front of the test detector. Measurement traceability for these calibrations comes from an electrically calibrated, primary standard calorimeter ca·lor i·met ric (k -lôr developed by NIST.
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