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Mykrolis to Showcase New and Enhanced Products for Semiconductor Manufacturing Applications at SEMICON West.


Business Editors/High-Tech Writers

SEMICON SEMICON Semiconductors Equipment and Material International Conference  West 2003

BILLERICA, Mass.--(BUSINESS WIRE)--July 7, 2003

Mykrolis Corporation (NYSE NYSE

See: New York Stock Exchange
: MYK MYK Monada Ypovrixion Kastrofon (Greek: Underwater Destruction Unit; Greek Navy's special warfare group) ), a leading supplier of components and subsystems to the semiconductor industry, will showcase several innovative products and technologies at the SEMICON West trade show (Booth #726) in San Francisco from July 14-16, 2003.

Mykrolis's products are used at various points in the semiconductor manufacturing process, for such applications as filtration and purification, liquid dispense, flow control, vacuum and pressure. Mykrolis's next-generation offerings reflect increasing demands from device makers and OEM tool suppliers for more stringent process control in the semiconductor manufacturing environment.

The following product innovations will on display at the Mykrolis booth:

-- Fluorogard(R) RS Cartridge and Disposable Filters for

contamination control in photoresist stripping and residue

removal processes

-- Impact(R) 2 Filter and Impact(TM) 2 Manifold for photochemical photochemical

in laser treatment, the laser light is absorbed and converted into chemical energy.
 

filtration

-- IntelliFlow(R) II Digital Mass Flow Controller A mass flow controller (MFC) is a device used to measure and control the flow of gases. A mass flow controller is designed and calibrated to control a specific type of gas at a particular range of flow rates.  offering

user-configurable gas types

-- Intellisys(TM) Chamber Pressure Control Valves integrated with

the XacTorr(TM) Digital Capacitance Diaphragm Gauge for

integrated pressure measurement and process control

-- Intercept(R) HP Cartridge Filter for particle removal in DHF DHF dihydrofolate or dihydrofolic acid. ,

HF, BOE, copper plating and low pH process chemistries

-- pHasor Phasor can refer to:
  • Phasor (electronics) - a vector with constant length (A) and constant phase angle (θ). It is usually represented as a complex exponential, A•ej θ.
(TM) II Membrane Contactor con·tac·tor  
n.
An electrical relay used to control the flow of power in a circuit.
 for delivery of bubble-free

dissolved gases

-- Planargard(R) CS Cartridge Filter for retention of unwanted

particles in point-of-use CMP CMP (cytidine monophosphate): see cytosine.


(1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information
 process

-- Processgard(TM) NP Cartridge and Disposable Filters for flat

panel display prefiltering or parts plating processes

-- Chemlock(TM) PFA Filter Housing for reduced installed-tool

space requirements and safer filter changeout

-- Wafergard(R) SC Point-of-Use Filter for high-pressure CO2 in

wafer stripping and cleaning applications

-- XacTorr Digital Capacitance Diaphragm Gauge for vacuum-based

thin film processes

"The Mykrolis products on display at this year's SEMICON West represent our ongoing commitment to provide our OEM and end-user customers with the most advanced technologies," said Jean-Marc Pandraud, president and chief operating officer Chief Operating Officer (COO)

The officer of a firm responsible for day-to-day management, usually the president or an executive vice-president.
 of Mykrolis. "By working closely with these customers, we're continuously identifying ways to enhance and refine our product lines. This ensures that our customers are equipped with the latest technologies and well prepared for the manufacturing challenges of tomorrow's advanced devices and finer linewidths."

About Mykrolis

Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit www.mykrolis.com.

Fluorogard, Impact, IntelliFlow, Intercept, Planargard, and Wafergard are registered trademarks, and Impact, pHasor, Processgard, XacTorr and Mykrolis are trademarks of Mykrolis Corporation.

Intellisys is a trademark of Nor-Cal Products, Inc.
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No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2003, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Jul 7, 2003
Words:479
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