Mykrolis Releases XacTorr Digital Capacitance Diaphragm Gauge with 160 Degrees C Rating.

Business Editors/High-Tech Writers

SEMICON West 2003

BILLERICA, Mass.--(BUSINESS WIRE)--July 14, 2003

Semiconductor Industry's Only High Temperature,

Digital Process Vacuum Gauge for Thin Film Processes

Mykrolis Corporation (NYSE: MYK), a leading supplier of components and subsystems to the semiconductor industry, today announced that a new model of its XacTorr(TM) Digital Capacitance Diaphragm Gauge (CDG) will be on display at SEMICON West (Booth #726) in San Francisco, CA, from July 14-16, 2003. Mykrolis's newest configuration expands XacTorr's application coverage to higher temperature processes.

Designed for aggressive LPCVD Nitride and Metal-CVD processes, the XacTorr CMX160 provides superior reliability by combining Mykrolis's patented shielded sensor technology and (patent pending) digital temperature control, greatly reducing the buildup of process condensable byproducts that lead to process drift and premature failure of the gauge.

Mykrolis's XacTorr products are the semiconductor industry's only Digital CDG with embedded self-diagnostics and independent diagnostic port. Compared to other Capacitance Manometers, the compact XacTorr line offers up to 40 percent volume reduction, minimizing footprint requirements and improving ease of installation.

Additionally, the XacTorr Digital CDG is a certified DEVICENET CONFORMANCE TESTED(R) product, having passed ODVA (Open DeviceNet Vendor Association) conformance testing for DeviceNet(TM) at composite test level 17 and additional semiconductor test version 2.3. The XacTorr was the first product to pass both of these conformance tests at ODVA's new Technology and Training Center, which opened in January 2003 in Ann Arbor, Michigan.

According to Shaun Pewsey, Mykrolis Business Development Manager, "Mykrolis will continue to fund research and development on targeted programs to ensure that our products meet critical customer needs for future semiconductor manufacturing processes. In particular, Mykrolis will expand its portfolio of high performance materials delivery and chamber management products, such as the IntelliFlow(R) II Digital Mass Flow Controller, XacTorr Digital Capacitance Diaphragm Gauge and the Intellisys(TM) line of Chamber Process Pressure Control Systems."

About Mykrolis

Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit www.mykrolis.com.

IntelliFlow is a registered trademark, and XacTorr and Mykrolis are trademarks of Mykrolis Corporation.

Intellisys is a trademark of Nor-Cal Products.

DeviceNet is a trademark and DEVICENET CONFORMANCE TESTED is a registered trademark of Open DeviceNet Vendor Association, Inc.