Mykrolis Releases New Filters and Manifold to Optimize Gel, Particle and Agglomerate Removal.
BEDFORD, Ma.--(BUSINESS WIRE)--April 25, 2002
As the industry searches for new methods to reduce wafer defects and transitions to 300 mm CMP CMP (cytidine monophosphate): see cytosine.
(1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information applications, contamination becomes more problematic and filtration at point of use rises in importance.
In response, Mykrolis Corporation (NYSE NYSE
See: New York Stock Exchange : MYK MYK Monada Ypovrixion Kastrofon (Greek: Underwater Destruction Unit; Greek Navy's special warfare group) ), a leading supplier to the semiconductor industry, announces disposable, five-inch Solaris(R) SLR (1) (Scalable Linear Recording) A line of magnetic tape drives from Tandberg Data that evolved from the QIC Data Cartridge format. See QIC.
(2) (Single Lens Reflex) A camera that uses the same lens for viewing and shooting. 01 and SLR03 Filters and the Solaris Manifold to reduce defect-causing particles, gels and agglomerates.
The SLR01 Filter meets small footprint requirements mandated for 300 mm CMP applications and optimizes the dispensing of fine particle slurries throughout Copper and STI STI systolic time intervals. processes. The SLR03 Filter manages larger particle slurries in oxide and metal processes. Comparative tests indicate Solaris filtration technology reduces wafer defects by a factor of 10.
The Solaris filters' propriety construction, with four inches of media specifically designed to retain gels and agglomerates, enables the filters to last more than twice the life of conventional depth filters. A self-venting feature allows microbubbles to flow through the filters and avoid potential slurry dry out.
Requiring no tools during maintenance, Solaris Manifold provides rapid filter change-out, easy installation or retrofit into existing tools and built-in safety precautions to limit chemical exposure.
Mykrolis Corporation, based in Bedford, Massachusetts Bedford is a town in Middlesex County, Massachusetts, United States. It is within the Greater Boston area, some 15 miles north-west of the city of Boston. The population of Bedford was 12,595 at the 2000 census. , is a global supplier of advanced process solutions for gas and liquid filters and delivery systems for the semiconductor, flat panel, fiber optic and optical disc industries. Mykrolis is formerly the Microelectronics Division of Millipore Corporation. For more information, visit www.mykrolis.com.