Multiple System Orders for Innovative Sonic Fog Technology.Business Editors FREMONT, Calif.--(BUSINESS WIRE)--April 4, 2000 AIO See all-in-one. Corporation, a manufacturer of advanced wafer drying systems, announced three major orders from three customers for its Sonic Fog(TM) product. The orders come from one of the largest semiconductor capital equipment suppliers in the world, a leading U.S. supplier of specialty semiconductor epitaxy epitaxy Process of growing a crystal of a particular orientation on top of another crystal. If both crystals are of the same material, the process is known as homoepitaxy; if the materials are different, it is known as heteroepitaxy. and wafers, and a major German opto-electronic device manufacturer. The Sonic Fog offers an alternative wafer drying technology that addresses contamination challenges commonly associated with current wet and dry processes. Sonic Fog is a liquid phase isopropyl alcohol isopropyl alcohol: see isopropanol. (IPA IPA - International Phonetic Alphabet ) drying system that has been successfully used in the semiconductor, disk drive and flat panel display A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time industries to completely dry substrates from 50 mm wafers to one meter square glass panels. The unique, patented process uses room temperature liquid IPA and ultrasonics ultrasonics, study and application of the energy of sound waves vibrating at frequencies greater than 20,000 cycles per second, i.e., beyond the range of human hearing. to achieve high levels of cleanliness and productivity. "AIO continues to penetrate the world market with its revolutionary clean, safe and effective technology," said Paul Shirra, vice president of AIO. "Our Sonic Fog is significantly better than current spin rinse dryer processes and vapor type solutions because of its low cost of ownership. It also offers superior benefits for 300 mm production and has been accepted by OEMs and chipmakers worldwide for a variety of applications." With low chemical emissions and efficient use of IPA, the Sonic Fog offers a simple, environmentally responsible process. It combines the benefits of non-motion, low consumption IPA drying and eliminates the need for fire suppression systems Fire suppression systems are used in conjunction with smoke detectors and fire alarm systems to improve and increase public safety Types
About AIO Corporation AIO Corporation is a privately held manufacturer of capital equipment for the electronics industry. Established in Fremont, California For the unincorporated community in Yolo County, California, see . Fremont (IPA: /ˈfriːmɒnt/) is a city in California that was incorporated on January 23, 1956, from the merger of five smaller communities: in 1988, AIO built its reputation on restoring wafer tracks. In 1995, AIO expanded its business to manufacturing numerous leading-edge cleaning and photolithography products. The Sonic Fog division has produced several patented systems that represent the next level of technology in substrate cleaning and drying. AIO's markets include IC manufacturers, flat panel display, disk drive, lasers and optics. Product line development follows a synergistic approach, using the core technology of vaporless IPA drying to produce new process solutions with each new system. For more information, contact AIO Corporation at (510) 249-1310 or visit the website: www.aio.com |
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