Micell Integrated Systems and BOC Edwards to Jointly Commercialize Supercritical CO2 Systems and Process Technology.

Business Editors/High-Tech Writers

RALEIGH, N.C.--(BUSINESS WIRE)--Jan. 7, 2003

Micell Integrated Systems (MIS), a subsidiary of Micell Technologies, announced today an alliance with BOC Edwards (BOCE) to further develop and commercialize technology for dense and supercritical CO2 semiconductor wafer processing in the microelectronics industry.

BOCE is a leading supplier of equipment, materials and services to the microelectronics industry.

MIS and BOC Edwards are jointly developing technology that will provide the semiconductor industry an integrated solution for the cleaning challenges associated with porous low k materials. The solution is comprised of high-purity CO2 and chemistry supply, along with equipment subsystems to support the delivery of these materials to wafer processing tools.

Additional systems for CO2 recycling and waste recovery are an integral part of the delivery technology. BOC Edwards has rights to and full commercial responsibility for products derived from Micell's intellectual property (IP) and jointly developed IP for wafer cleaning, stripping and drying unit operations for the microelectronics markets.

"MIS's technology development efforts are pioneering the use of carbon dioxide to enhance the manufacturability of integrated circuits, memory devices, MEMS, and other micro-devices," said Dr. James B. McClain, President and Chief Technology Officer of Micell Technologies. "Our focused alliance with BOCE is critical to the initial transition of CO2 process capability from a promising developmental technology to a commercial reality, meeting the International Technology Roadmap for Semiconductors (ITRS) targeted introduction of qualification/pre-production scale CO2-based strip and clean processes in 2005."

The integrated CO2 and chemistry supply, process subsystem and abatement solutions that MIS helps BOCE bring to market for cleaning, drying, and stripping unit operations will provide a platform for the development of additional CO2-based manufacturing processes. MIS is currently working on several CO2-based process technologies in collaboration with its academic research partners at the University of North Carolina at Chapel Hill and North Carolina State University. These potential process technologies include CO2-based spin-on thin film deposition, image development, thin-film treatment and image management, advanced deposition of polymers and metals, as well as chemical mechanical planarization (CMP) and particle processing.

Editor Background

Micell Integrated Systems, Inc. was established as a subsidiary of Micell Technologies (www.micell.com) in January 2001. Micell Technologies was a start-up launched in 1996 based on technology licensed from the UNC-CH. Micell pioneered the use of liquid CO2 in the professional garment care industry through the establishment of franchised business called Hangers Cleaners. Today there are over 70 Hangers cleaners opened nationwide. Micell sold the Hangers Cleaners business and proprietary dry cleaning technology in January 2002.

The Micell group combines powerfully innovative and creative capabilities in developing CO2-based process solutions with a proven track record in providing commercially viable integrated CO2-based systems. MIS leverages ideas, inventions and a robust patent portfolio with unique know-how and talent to create enabling CO2-based wafer processes for the microelectronics industry. Specific information on MIS can be accessed directly via www.micellintegratedsystems.com.

BOC Edwards, part of The BOC Group plc, is a leading supplier of integrated solutions for the manufacture of microelectronics devices, including silicon semiconductors, compound semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be accessed directly on www.bocedwards.com.