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Matheson Tri-Gas Releases ``NANOCHEM Sidecar Purifier System'' for ASM's Epsilon Series of Single-Wafer Epitaxial Semiconductor Processing Tools.

Business Editors/High-Tech Writers


Matheson Tri-Gas, Inc., a world leader in specialty gases, bulk gases, gas handling equipment, and purification systems, today announced the introduction of the NANOCHEM(R) Sidecar(TM) Purifier System, an integrated solution for point-of-use purification of process gases for ASM(R)'s (Nasdaq:ASMI) Epsilon(R) series of single-wafer epitaxial semiconductor processing tools. This new product takes advantage of Matheson's unique capability to purify 32 semiconductor gases, and to design and manufacture customized gas handling equipment that meet the specific needs of state-of-the-art semiconductor process tools. The NANOCHEM Sidecar Purifier System houses the most commonly used NANOCHEM brand, HCl, H2 and N2 purifiers in a single enclosure, for the ASM Epsilon low temperature SiGe process. It is designed to conserve space and optimize purifier operation, and be either directly integrated onto the process tool or installed as a standalone system.

ASM Epsilon tools are capable of the most advanced processes including Silicon Germanium (SiGe) which is used in the production of high-speed semiconductor devices. Point-of-use gas purification has been found to be an effective method of oxygen and moisture control necessary to achieve optimum performance in SiGe and other advanced low temperature epitaxial applications. "We have had excellent results with Matheson's NANOCHEM(R) purifiers for the purification of specialty gases used in the production of epitaxial wafers on our Epsilon tools," said Bob Haro, Director of Epitaxial Products, ASM America. "ASM decided to actively participate with Matheson Tri-Gas to co-develop a customized solution for our Epsilon customers. The Sidecar Purifier System provides a cost and space efficient method of meeting the gas purification requirements of low temperature epitaxial processing."

The NANOCHEM Sidecar Purifier System features enhanced purge capabilities, dual process isolation valves, flow control for precise purifier conditioning, and end point detection that can be connected to the Epsilon controller. "We are very excited about our collaboration with ASM to deliver an integrated gas purification solution for their Epsilon tools. We have been providing NANOCHEM purifiers to ASM's Phoenix Demo Lab and Epsilon customer base for many years," said Roy E. Nemoto, Purification Business Director, Matheson Tri-Gas, Inc. "This partnership allows us to go the next step, and provide a complete purification system, conveniently integrated with the process tool. Matheson has pioneered the manufacture of germane, and is a SEMI award winner for the 1st commercial manufacture of silane. Matheson is committed to serve the compound semiconductor market, which includes emerging SiGe processes."

ASM is a world-class supplier of single-wafer epitaxial tools and related semiconductor process equipment. ASM has been building and selling epitaxial reactors since 1987 and its Epsilon reactors are used in mass production by all major semiconductor device manufacturers and wafer suppliers worldwide. ASM International N.V. is headquartered in Bilthoven, the Netherlands. ASM International's subsidiaries design, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing, assembly and packaging through their facilities in the United States, Europe, Japan and Asia. ASM International's common stock shares trade on NASDAQ (symbol ASMI) and the Euronext Stock Exchange in Amsterdam (symbol ASM). Additional information can be found on ASM's web site at

Matheson Tri-Gas is a single source provider of specialty gases, bulk gases, gas handling equipment, purification systems and support services to semiconductor manufacturers worldwide. Semi-Gas Division core competencies include its ULTRA-LINE(R) high purity process gases, SDS(R) (Safe Delivery Source), Semi-Gas(R) Systems brand of gas handling equipment, NANOCHEM(R) and PerfectH2(TM) brands of purification systems, customer technical services, systems engineering and site management services. Matheson Tri-Gas' corporate headquarters is in Parsippany, New Jersey. The Semi-Gas Division is located in San Jose, California. Additional information can be found on Matheson Tri-Gas' web site at

Note to Editors: ASM and Epsilon are registered trademarks of ASM International.

Semi-Gas Systems, UltraLine and NANOCHEM are registered trademarks of Matheson Tri-Gas, Inc. Sidecar and PerfectH2 are trademarks of Matheson Tri-Gas, Inc.
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Publication:Business Wire
Date:Dec 4, 2001
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