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Leti Select Trikon Sigma fxP 200mm Metal Deposition System for Bulk Acoustic Wave Application.


NEWPORT, Wales -- Trikon Technologies Inc. (Nasdaq:TRKN), today announced the shipment of Sigma fxP metal deposition equipment to CEA CEA carcinoembryonic antigen.

CEA
abbr.
carcinoembryonic antigen


CEA (Carcinoembryonic antigen) 
 Leti, the Laboratoire d'Electronique de Technologie de l'Information centered in Grenoble, France. The system will be used for the research and development of Bulk Acoustic Wave resonators, a next generation filter technology used in cell phones, Bluetooth and WLAN See wireless LAN.

WLAN - wireless local area network
 systems.

"BAW BAW Black America Web
BAW Brain Awareness Week
BAW Bulk Acoustic Wave
BAW Bells And Whistles
BAW Bicycle Alliance of Washington (Washington state, USA)
BAW Bis Auf Weiteres (German: see you later) 
 deposition is a key area for us, and our strengths fit the demands of this segment; calling for technology excellence on production proven platforms" said David Butler, Director of Marketing at Trikon. "The Leti sale is significant as this is one of the first 200 mm BAW lines anywhere in the world. Their intention is to integrate BAW devices with logic circuits to reduce costs and form factor over current discrete approaches. Fabricating BAW devices above IC will drive this market forward and open new applications for the technology."

Claude Massit, Manager of Heterogeneous Integration on Silicon Department at Leti commented, "Together with our industrial partners, we selected Trikon's Sigma fxP after a detailed evaluation period involving film characterization experiments and device fabrication. To meet our aggressive development schedule, we were looking for a partner that understood BAW technology, with the commitment and infrastructure to deliver to our milestones. Trikon met and exceeded our expectations in all aspects."

BAW device yield is directly linked to thickness and material quality of the piezoelectric The property of certain crystals that causes them to produce voltage when a mechanical pressure is applied to them such as sound vibrations. This technique is used to build crystal microphones, phonograph cartridges and strain gauges, all of which turn mechanical movement into voltage.  layer and Trikon has developed a number of key technology enablers in the arena of insulator deposition, surface treatments to enable correct filter quality on multiple electrode types, and most importantly thickness control within wafer and wafer to wafer. The Sigma fxP tool can be configured with patented hardware specifically developed for BAW deposition applications.

About Trikon Technologies

Trikon Technologies is a leading provider of wafer fabrication equipment and services to the global semiconductor industry. Trikon develops and manufactures advanced capital equipment for plasma etching and chemical and physical vapor deposition This article or section is in need of attention from an expert on the subject.
Please help recruit one or [ improve this article] yourself. See the talk page for details.
 (CVD CVD Cardiovascular disease, see there  and PVD PVD
abbr.
peripheral vascular disease


PVD Peripheral vascular disease, see there
) of thin films for use in the production of semiconductor devices. These are key components in most advanced electronic products, such as telecommunication devices, consumer and industrial electronics and computers. More information is available on the internet at: www.trikon.com

About CEA Leti

CEA Leti (Grenoble, France) is at the leading edge of European microelectronics and microtechnologies research. It employs about 900 people and with its more than 150 patents filed per year and its 28 start-ups created or being created, it ranks among the major partners of the industrial world. Instigator in·sti·gate  
tr.v. in·sti·gat·ed, in·sti·gat·ing, in·sti·gates
1. To urge on; goad.

2. To stir up; foment.



[Latin
 of the MINATEC micro and nanotechnologies innovation centre project, the CEA Grenoble is also one of its main partners.

The CEA plays a major role in research, development and innovation in three main fields: energy, information and healthcare technologies, and defence. Its ability to combine fundamental research and valorization val·or·ize  
tr.v. val·or·ized, val·or·iz·ing, val·or·iz·es
1. To establish and maintain the price of (a commodity) by governmental action.

2.
 in an industrial framework enables it to play a leading role in innovation. Some 15,000 people are employed at CEA in 9 sites in France. www.cea.fr
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Copyright 2004, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Oct 14, 2004
Words:497
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