Lam Research to Present Etch, CMP, CVD, and 300 mm Solutions at SEMICON Europa.

FREMONT, Calif.--(BUSINESS WIRE)--March 26, 1998--Lam Research Corp. (NASDAQ:LRCX), a leading supplier of wafer fabrication equipment to the worldwide semiconductor industry, today announced that it will highlight its recently released Teres(TM) integrated chemical mechanical planarization (CMP) and TCP(TM) 9400PTX poly etch systems.

Lam will also feature several of its market-leading etch systems, CVD products, and 300 mm solutions with multimedia presentations, graphics, and videos at SEMICON(R) Europa. The show runs March 31-April 2, 1998 at the Palexpo in Geneva, Switzerland. Lam will be exhibiting in Booth 1351. Lam will also host a technical symposium on April 1 at the Movenpick Hotel.

The small-footprint, multi-station integrated Teres CMP system is Lam's first dry-in/dry-out planarization system, designed to minimize contamination and maximize productivity. Its patented Linear Planarization Technology(TM) provides a 3:1 planarization efficiency advantage over conventional methods and solves pattern density, dishing, and erosion problems.

The high-density TCP 9400PTX etch system extends the proven technology of the TCP 9400SE and meets the market's needs for higher productivity, lower cost of ownership (COO), and improved process performance. It is optimized for demanding applications such as advanced poly/polycide gate etch and shallow trench isolation for 0.18 micron technology.

The line-up of additional products being featured in Europe are the TCP 9100 and Rainbow(TM) 4520XL for oxide etch and the TCP 9600PTX for metal etch; the DSM 9800 and 9900 for CVD; and the Synergy(TM) and OnTrak Systems, Inc. Synergy Integra(TM) for CMP. According to Didier Andre, vice president, sales and field operations for Europe, "SEMICON Europa is an ideal opportunity to showcase our new product offerings and remind European customers of our worldwide service infrastructure and TRAC technical support designed to maximize system uptime."

The technical symposium at the Movenpick Hotel on April 1 features presentations from several key Lam customers. Topics will cover a variety of important issues, including etch applications, 300 mm, CMP, plasma diagnostics, and reduction of PFCs.

Lam Research Corp. is a leading supplier of wafer fabrication equipment and services to the world's semiconductor industry. Lam's headquarters are located in Fremont, Calif. The company's common stock trades on the Nasdaq National Market under the symbol LRCX. Lam's World Wide Web address is http://www.lamrc.com.

CONTACT: Lam Research Corp.

Lisa Garber, 510/572-4538 (Corporate Communications)

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