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Lam Provides SEMATECH with TCP 9100 High-Density Oxide Etch System; Collaborate on Joint Development Project Focused on Dual Damascene.


FREMONT, Calif.--(BUSINESS WIRE)--Sept. 8, 1997--Lam Research Corporation (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
:LRCX), a leading supplier of manufacturing equipment to the worldwide semiconductor and flat panel display A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time  industries, today announced that it will collaborate with SEMATECH SEMATECH Semiconductor Manufacturing Technology , a non-profit R&D consortium of United States semiconductor manufacturers, on a joint development project to evaluate various low-k interlevel dielectric (ILD) etch processessses different from those currently used in silicon dioxide etching. The damascene process replaces the tl damascene interconnect process. Their findings will be published in a report issued to SEMATECH's member e dielectrics into which metal lines will be inlaid. The relationship between SEMATECH and Lam will allowaining the etch industry's leader by developing the benefits of dual damascene with the SEMATECH member companies."

Recently, Lam was named by both Dataquest andnd services to the world's semiconductor and flat p anel display industries. The Company's broad product por the Asia/Pacific region to support its growing customer base. Lam acquired OnTrak Systems, Inc., the leader in CMP CMP (cytidine monophosphate): see cytosine.


(1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information
 cleaning technology, in August 1997. The Company'sm

David Ringler, 510/572-6848 (Investor Relations)

david.ringler@lamrc.com

ge.

URL URL
 in full Uniform Resource Locator

Address of a resource on the Internet. The resource can be any type of file stored on a server, such as a Web page, a text file, a graphics file, or an application program.
: http://www.businesswire.com
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No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 1997, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Sep 8, 1997
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