Jenoptic Infab Introduces New Standard in 200MM Ergonomic SMIF Wafer Handling; New Generation ERGOSPEED 3000 Series Increases Speed, Eases Loading and Unloading Wafers.

JENA, Germany--(BUSINESS WIRE)--July 24, 1997--Jenoptik Infab, a leading worldwide integrator for wafer fab automation and process control, has introduced its new generation of ERGOSPEED Series.

The new SMIF robots are ergonomically designed to ease loading and unloading wafers. Jenoptik Infab's ERGOSPEED has become the market's most widely accepted system for productivity and reliability in ergonomic SMIF (Standard Mechanical InterFace) loading. More than 1,000 ERGOSPEED systems have been sold worldwide.

With this advanced technology, Jenoptik Infab has set the pace for ergonomic loading in a system that has become a world standard in wafer handling. Now, after a proven track record in the field, Jenoptik Infab introduces a new ERGOSPEED which provides:

-- A small footprint for excellent cleanroom space utilization

-- A high throughput

-- A cycle time reduction of 40%

-- Extended reliability and increased MTBF 

-- Easy access for serviceability 

-- Handling and user ease with optional PC control

-- A completely new machine control software

The key to this unique low-load system is an elevator mechanism which enables the transport of the wafer pod between an ergonomically positioned port plate and the operation level of the process tool. The operator simply places the pod on the plate, locks it into place, then raises the pod to the equipment loading height. When the pod door opens, the cassette is transferred between the pod and the equipment station. After processing, the door opens again and the cassette is returned into the pod. The pod is then returned to an ergonomic height and easily disengaged from the port.

High Speed. Fast Throughput.

The ERGOSPEED 3000 Series can significantly increase process tool productivity. Downtime through equipment failures and untimely delays in ramp-up and installation are major barriers to productivity. The ERGOSPEED 3000 Series has been designed to provide solutions. Easy to install, ERGOSPEED robots allow optimum tool utilization. And, with a guaranteed reliability rate of 50,000 MCBF (Mean Cycles Between Failure), IC manufacturers are thus able to concentrate their efforts in more productive areas.

Clean Wafer Handling

A "clean" design enables the ERGOSPEED 3000 Series to provide a unique solution for clean wafer handling. All particle-generating parts are encapsulated to separate them from the wafer handling environment.

The superior air flow solution integrates the filter fan unit into the ERGOSPEED system without further need for an additional minienvironment, thereby minimizing footprint cost. The horizontal air flow design through the entire ERGOSPEED generates a laminar air flow parallel to the wafer surface, and consequently particle contamination by turbulence is completely avoided.

Automatic Wafer Reseating

Integral to all robots within the ERGOSPEED 3000 Series is a FLYSWAT(TM) reseating mechanism which has the ability to re-seat improperly seated wafers, thereby preventing wafer damage, minimizing contamination through operator intervention, and saving time. The integrated sensor detects protruding wafers and instructs the FLYSWAT arm when and where to take corrective action.

For more information regarding the new ERGOSPEED 3000 Series, call or write Jenoptik Infab, Goeschwitzer Strasse 25. D-07745 Jena, Germany, [phone], Fax [phone].

Jenoptik Infab is a member of the Jenoptik Group, a global organization of high-technology companies owned by Jenoptik AG, a holding company based in Jena, Germany, which last year grossed US$1 billion in sales. The Jenoptik Group provides leading-edge solutions to semiconductor fab building and automation integration, telecommunications, laser and optical systems, bioinstruments and microsystems.

Jenoptik Infab, along with Meissner + Wurst, are two Jenoptik Group companies which address the semiconductor industry. Together, Jenoptik Infab and Meissner + Wurst, achieved in 1996 sales in excess of US$550 million and employ more than 1,400 worldwide. Jenoptik Infab is a leading worldwide integrator for fab automation and control, and provides a wide range of products and services, including all aspects of logistics and work flow, front tool automation (SMIF, FOUP/FIMS), contamination control and CIM software integration.

Meissner + Wurst is a world leader in facility design and construction and an innovator in optimizing the performance of wafer fabs. Together, Jenoptik Infab and Meissner + Wurst offer to their customers worldwide an innovative, totally integrated next-generation solution to fab design, construction and process automation which reduces non-productive cycle time and enhances profitability.

CONTACT: Jenoptik Infab

Andrea Schon, 49-3641-65 4100

[e-mail]

or

Mathews & Clark

Tim Alban, 512/345-0600

[e-mail]