Innovative Multi-Site Wafer Level Reliability Test System is Introduced by SUSS.

MUNICH, Germany -- SUSS MicroTec AG (FWB:SMH) has introduced an analytical probe system dedicated to Multi-Site Wafer Level Reliability (WLR) testing.

With integrated devices becoming increasingly complex, the need to ensure that every transistor will last over the IC's lifetime has become almost as important as testing the functionality of the device itself. Reliability tests stress the device over several hours or even days in order to simulate how the device would act under normal conditions throughout its expected lifetime.

In order to prevent the loss of processed and therefore expensive wafers, it has become essential to be able to perform reliability tests on the wafer itself. The importance of this test option will grow in the near future as process technologies move towards the 90 nm range. WLR also saves time as the noise floor of packaged part testers is often so large that a test can take up to 300 hours while the engineer waits for the leakage values to increase above the machine's noise floor. The much lower noise floor of a wafer-level set-up (consisting of parametric analyzer, analytical probe station, and probe card) allow the engineer to see precise leakage trends at wafer-level usually overnight.

Multi-site probing speeds up the process even further and enables the test engineer to obtain reasonable sample sizes. It requires a probecard which can contact devices spread over the whole wafer simultaneously rather than in sequence. The tests demand low leakage measurement equipment which can withstand temperatures up to and exceeding 300 degrees C which is needed for accelerating failure mechanisms.

The SUSS PM8WLR ProbeShield(R) system is especially developed for extremely accurate, high-temperature multi-site WLR measurements, such as: electro-migration, TDDB, hot carrier, wafer level burn-in, life test and/or device characterization. The z-axis remains completely stable, regardless of temperature extremes or test duration thus eliminating drift problems.

Developed to meet the critical needs of 90 nm or smaller process technologies used by semiconductor manufacturers, the SUSS PM8WLR ProbeShield system, in combination with Celadon probe cards and measurement equipment such as the Keithley 4200, provides long-term process reliability at all temperatures up to 300 degrees C.

The PM8WLR ProbeShield is a light-tight, EMI shielded probe system which contains a thermal chuck with a temperature range from -60 degrees C to +300 degrees C. The ProbeShield's rinsing system ensures frost-free conditions when probing at negative temperatures.

Because the probe card contacts all dies simultaneously, the microscope must move over the entire wafer to perform correct probe to pad alignment. This SUSS PM8 has a special microscope stage which can move 200 mm in both x & y to cover the whole wafer. The movement has been especially designed with user comfort in mind and has the control knobs ergonomically placed on the side of the prober so that one-handed use is possible.

"With one dedicated multi-site PM8 WLR system from SUSS engineers are able to perform tests that would normally require 3 semiautomatic systems" states Dr. Claus Dietrich, International Product Manager at SUSS, further proving the cost saving potential of the new SUSS WLR system.

A brochure on the system is available at www.suss.com/pm8wlr

The PM8WLR will be demonstrated at Semicon West, San Jose on the Keithley Booth #11219 from July 14th to 16th.

About SUSS MicroTec

SUSS MicroTec is a leading supplier of production, process and test technology for the semiconductor industry. SUSS maintains its leadership position with over 7,000 systems installed worldwide. SUSS products include coating developing systems, 1X full-field lithography (1XFFL) systems, substrate bonders, flip-chip bonders and probe systems. Headquartered in Munich, Germany, SUSS has 5 international manufacturing sites and provides support from sales and service centers in North America, Europe, Asia and Japan. SUSS MicroTec AG is listed in the Prime Standard segment of the German Stock Exchange. For more information, please visit http://www.suss.com.

All statements in this release other than historical facts are forward-looking statements within the meaning of U.S. Private Securities Litigation Reform Act of 1995. Words such as "believe", "expect", "intend", "anticipate", "estimate", "should", "may", "will", "plan" and similar words and terms used in relation to the enterprise are meant to indicate forward-looking statements of this kind. The company accepts no obligation toward the general public to update or correct forward-looking statements. All forward-looking statements are subject to various risks and uncertainties, as a result of which actual events may diverge numerically from expectations. The forward-looking statements reflect the view at the time they were made.