Ibis Technology Ships Second i2000 Oxygen Implanter to SUMCO.

DANVERS, Mass. -- Ibis Technology Corporation (Nasdaq NM: IBIS), a leading provider of SIMOX-SOI implantation equipment to the worldwide semiconductor industry, today announced the shipment of a second Ibis i2000 oxygen implanter to Sumitomo Mitsubishi Silicon Corporation (SUMCO), the world's second largest silicon wafer manufacturer. This implanter recently completed the factory acceptance process at Ibis, as announced on April 3, 2006, and now is scheduled to be installed in the customer's facility in Japan and undergo final on-site acceptance testing.

Martin J. Reid, president and chief executive officer of Ibis Technology Corporation, said, "We are expediting the installation and testing of this machine at SUMCO's request. They are anxious to add it to their production capabilities in order to meet the semiconductor industry's growing demand for 300-millimeter SIMOX-SOI wafers."

Revenue recognition of approximately $7 million for the sale of this implanter, which is expected to occur by the end of the third quarter of this year, will be based on final customer acceptance at SUMCO's facility, the timing of which may vary depending on a number of factors, which include the customer's site being properly facilitized (power, water, air) and performance of the tool. As a result, Ibis cannot provide any guarantees with respect to when or whether it will recognize revenue on this transaction.

SUMCO's first i2000 implanter completed the final customer acceptance process last month.

SUMCO, one of the world's top two manufacturers of silicon wafers, is headquartered in Tokyo, Japan, and operates fourteen manufacturing facilities located in Asia, Europe and the United States.

About Ibis Technology

Ibis Technology Corporation is a leading provider of oxygen implanters for the production of SIMOX-SOI (Separation-by-Implantation-of-Oxygen Silicon-On-Insulator) wafers for the worldwide semiconductor industry. Headquartered in Danvers, Massachusetts, the company maintains an additional office in Aptos, California. Ibis Technology is traded on the Nasdaq National Market under the symbol IBIS. Information about Ibis Technology Corporation and SIMOX-SOI is available on Ibis' web site at www.ibis.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995

This release contains express or implied forward-looking statements regarding, among other things, (i) the expected on-site acceptance of the i2000 implanter ordered by SUMCO, (ii) attaining implanter improvements to the degree and in the timeframe necessary to meet customer expectations, (iii) the timing and likelihood of revenue recognition on the SUMCO implanter, (iv) the timing of SUMCO's ramping to production quantities on the i2000 implanters (v) customer interest in and demand for, and market acceptance of, the Company's SIMOX-SOI technology, (vi) the Company's belief that wafer manufacturers will become the primary suppliers of SIMOX-SOI wafers to the chipmaking industry, (vii) the Company's ability to conduct its operations in a manner consistent with its current plan and existing capital resources or otherwise to obtain additional implanter orders or to secure financing to continue as a going concern, (viii) the Company's plan to focus on supplying implanters to wafer manufacturers, (ix) the Company's expectations regarding future orders for i2000 implanters, (x) the adequacy of the Company's cash resources for continuing and future operations, and (xi) the adoption rate of SOI technology. Such statements are neither promises nor guarantees, but rather are subject to risks and uncertainties which could cause actual results to differ materially from those described in the forward-looking statements. Such risks and uncertainties include, but are not limited to, cessation as a going concern due to the depletion of the Company's cash reserves at an unanticipated rate combined with an inability to obtain customer orders or to secure financing, future continued migration to SOI technology and market acceptance of SIMOX, the level of demand for the Company's products, the Company's ability to pursue and maintain further strategic relationships, partnerships and alliances with third parties, the Company's ability to protect its proprietary technology, the potential trends in the semiconductor industry generally, the ease with which an i2000 can be installed and qualified in fabrication facilities, the likelihood that implanters, if ordered, will be qualified and accepted by customers without substantial delay, modification, or cancellation, in whole or in part, the likelihood and timing of revenue recognition on such transactions, the impact of competitive products, technologies and pricing, the impact of rapidly changing technology, the possibility of further asset impairment and resulting charges, equipment capacity and supply constraints or difficulties, the Company's limited history in selling implanters, general economic conditions, and other risks and uncertainties described in the Company's Securities and Exchange Commission filings from time to time, including but not limited to, the Company's Annual Report on Form 10-K for the year ended December 31, 2005. All information set forth in this press release is as of April 18, 2006, and Ibis undertakes no duty to update this information unless required by law.