Ibis Technology Announces Factory Acceptance of SUMCO's Second i2000 Implanter.

DANVERS, Mass. -- Ibis Technology Corporation (Nasdaq NM: IBIS), a leading provider of SIMOX-SOI implantation equipment to the worldwide semiconductor industry, today announced that Ibis and Sumitomo Mitsubishi Silicon Corporation (SUMCO) have completed the factory acceptance process for the second Ibis i2000 oxygen implanter ordered by SUMCO. As a result of completing this milestone, Ibis will issue an invoice to SUMCO for approximately $3.5 million.

SUMCO placed an order for this i2000 implanter in October 2005. Since that time, the system has undergone final configuration to meet SUMCO's requirements and has been tested against a comprehensive set of performance specifications. Ibis Technology's customer support manager, Lou Kaminski, reported that the acceptance processes "continue to get smoother and faster with each implanter we build."

Shipment of this system is expected to occur during the second quarter of this fiscal year.

"This is the second Ibis i2000 implanter ordered by SUMCO," said Martin J. Reid, president and CEO of Ibis Technology. "We are expediting the shipment, installation and final customer acceptance of this machine at the request of our customer, who is anxious to add it to their production capabilities in order to meet the growing demand for 300-millimeter SIMOX-SOI wafers."

Ibis plans to recognize revenue of approximately $7.0 million from the sale of this implanter after the system has been shipped and installed in SUMCO's facility and final customer acceptance testing has been completed. According to Reid, this is expected to occur before the end of the third quarter of this fiscal year.

SUMCO's first i2000 implanter recently completed final customer acceptance testing at their facility in Japan, as reported on March 13, 2006.

SUMCO is one of the world's top two manufacturers of silicon wafers. Headquartered in Tokyo, Japan, SUMCO operates fourteen manufacturing facilities located in Asia, Europe and the United States.

About Ibis Technology

Ibis Technology Corporation is a leading provider of oxygen implanters for the production of SIMOX-SOI (Separation-by-Implantation-of-Oxygen Silicon-On-Insulator) wafers for the worldwide semiconductor industry. Headquartered in Danvers, Massachusetts, the Company maintains an additional office in Aptos, California. Ibis Technology is traded on the Nasdaq National Market under the symbol IBIS. Information about Ibis Technology Corporation and SIMOX-SOI is available on Ibis' web site at www.ibis.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995

This release contains express or implied forward-looking statements regarding, among other things, (i) the expected shipment and on-site acceptance of the second i2000 implanter ordered by SUMCO, (ii) the timing and likelihood of revenue recognition on that implanter, and (iii) the timing of SUMCO's ramping to production quantities on the i2000 implanter. Such statements are neither promises nor guarantees but rather are subject to risks and uncertainties which could cause actual results to differ materially from those described in the forward-looking statements. Such risks and uncertainties include, but are not limited to, unexpected events that could prevent the i2000 implanter ordered by SUMCO from being shipped and then qualified and accepted by SUMCO without substantial delay, modification or cancellation, in whole or in part, risks relating to SUMCO ramping to production quantities, and those other risks and uncertainties described in the company's Securities and Exchange Commission filings from time to time, including but not limited to, the company's Annual Report on Form 10-K for the year ended December 31, 2005. All information set forth in this press release is as of April 3, 2006, and Ibis undertakes no duty to update this information unless required by law.