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ISSYS Inc. / NanoGetters Awarded New Patent for Getter and Hermetic Packaging Method.

YPSILANTI, Mich. -- Integrated Sensing Systems, Inc. (ISSYS ISSYS Integrated Sensing Systems ) and its subsidiary NanoGetters(TM) announced that the U.S. Patent Office has granted it a utility patent (US 6,923,625) entitled "Method of forming a reactive material and article formed thereby."

This patent describes a new method of forming vacuum and inert hermetic hermetic /her·met·ic/ (her-met´ik) impervious to air.

her·met·ic or her·met·i·cal
Completely sealed, especially against the escape or entry of air.
 packages for microsensors, actuators and displays. It complements other patents owned by ISSYS in the area of packaging and MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s.  devices. Used in the majority of ISSYS's MEMS-based products and sold to more than a dozen customers under the trade name NanoGetters(TM), this reactive material and packaging process has applications in devices like gyroscopes, pressure sensors, flow sensors, RF-MEMS RF-MEMS Radio Frequency Microelectromechanical System , displays, IR and optical sensors, density meters and chemical concentration sensors. Without getters vacuum packaged microdevices generally have pressures on a few Torr, while with NanoGetters the pressure drops into the microTorr region, a 10,000X improvement.

Dr. Douglas R. Sparks, ISSYS Executive Vice President and President of NanoGetters(TM) stated, "This new patent and the technology offers a way to vastly improve the hermetic packaging of a large array of different microsensor Microsensor

A very small sensor with physical dimensions in the submicrometer to millimeter range. A sensor is a device that converts a nonelectrical physical or chemical quantity, such as pressure, acceleration, temperature, or gas concentration, into an
 and displays. It truly has been applied across a wide spectrum of medical, scientific, consumer electronics, automotive and defense applications. NanoGetters(TM) has enabled new devices to be produced that were impractical to make without this improved vacuum packaging, and it has improved the performance and reliability of existing devices. It's rewarding to see an invention be used in so many fields."

Company Background:

ISSYS is a leader in advanced micromachining technologies for medical devices, microfluidic and scientific analytical sensing applications used in the development of drug infusion pumps and wireless, implantable sensing systems. Founded in 1995 by world renowned leaders in MEMS technology, ISSYS operates an "everything under one roof" multi-million-dollar, state-of-the-art Bio-MEMS fabrication facility located near Ann Arbor, Michigan

“Ann Arbor” redirects here. For other uses, see Ann Arbor (disambiguation).
Ann Arbor is a city in the U.S. state of Michigan and the county seat of Washtenaw County.
. NanoGetters(TM) is a wholly owned subsidiary Wholly Owned Subsidiary

A subsidiary whose parent company owns 100% of its common stock.

In other words, the parent company owns the company outright and there are no minority owners.
 of ISSYS dedicated to commercializing new reactive materials and packaging techniques. For more company, product and service information, please visit and
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Publication:Business Wire
Geographic Code:1USA
Date:Aug 25, 2005
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