ISSYS Inc. / NanoGetters Awarded New Patent for Getter and Hermetic Packaging Method.
This patent describes a new method of forming vacuum and inert hermetic packages for microsensors, actuators and displays. It complements other patents owned by ISSYS in the area of packaging and MEMS devices. Used in the majority of ISSYS's MEMS-based products and sold to more than a dozen customers under the trade name NanoGetters(TM), this reactive material and packaging process has applications in devices like gyroscopes, pressure sensors, flow sensors, RF-MEMS, displays, IR and optical sensors, density meters and chemical concentration sensors. Without getters vacuum packaged microdevices generally have pressures on a few Torr, while with NanoGetters the pressure drops into the microTorr region, a 10,000X improvement.
Dr. Douglas R. Sparks, ISSYS Executive Vice President and President of NanoGetters(TM) stated, "This new patent and the technology offers a way to vastly improve the hermetic packaging of a large array of different microsensor and displays. It truly has been applied across a wide spectrum of medical, scientific, consumer electronics, automotive and defense applications. NanoGetters(TM) has enabled new devices to be produced that were impractical to make without this improved vacuum packaging, and it has improved the performance and reliability of existing devices. It's rewarding to see an invention be used in so many fields."
ISSYS is a leader in advanced micromachining technologies for medical devices, microfluidic and scientific analytical sensing applications used in the development of drug infusion pumps and wireless, implantable sensing systems. Founded in 1995 by world renowned leaders in MEMS technology, ISSYS operates an "everything under one roof" multi-million-dollar, state-of-the-art Bio-MEMS fabrication facility located near Ann Arbor, Michigan. NanoGetters(TM) is a wholly owned subsidiary of ISSYS dedicated to commercializing new reactive materials and packaging techniques. For more company, product and service information, please visit http://www.mems-issys.com/ and http://www.nanogetters.com.
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|Date:||Aug 25, 2005|
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