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ISE and SIGMA-C Announce Partnership for Advanced Technology Simulation -- Integration of Lithography in ISE TCAD --.


Business Editors & Technology Writers

ZURICH, Switzerland--(BUSINESS WIRE)--Dec. 4, 2002

Today, ISE Ise (ē`sā), city (1990 pop. 104,164), Mie prefecture, S Honshu, Japan, on Ise Bay. It is one of the foremost religious centers of Shinto, the site of the shrines of Ise.  Integrated Systems Engineering AG, Zurich, Switzerland, announced a partnership with SIGMA-C GmbH, Munich, Germany.

The partnership aims to address the increasing demands on process and device simulation for the latest semiconductor technology nodes. As part of the new partnership, SIGMA-C's simulation software Simulation software is based on the process of imitating a real phenomenon with a set of mathematical formulas. It is, essentially, a program that allows the user to observe an operation through simulation without actually running the program.  SOLID-CTM will be included in ISE TCAD TCAD Technology Computer-Aided Design
TCAD Tompkins County Area Development (Ithaca, NY, USA)
TCAD Travis Central Appraisal District (Austin, Texas)
TCAD Tennessee Commission on Aging and Disability
. This will improve the predictability of process and device simulations by using realistic structures. The use of subwavelength lithography is standard, and it is necessary to use simulation for pattern transfer prediction.

"Lithography effects have an increasing influence on design for manufacturability and yield. By providing this close link between ISE's TCAD environment and SIGMA-C's lithography products, unique solutions and completely novel capabilities will be available to our customers," said Wolfgang Fichtner, CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of ISE.

SIGMA-C's President, Christian Kalus commented, "The simulation software produced by ISE and SIGMA-C complement each other. SOLID-CTM has a reputation for being the most accurate and fastest simulation software in the subwavelength domain. ISE TCAD is well known for using the best available models for physical process and device simulation. Integrating these products will enhance productivity in semiconductor development and manufacturing."

Customers have stated repeatedly that the current TCAD simulation programs treat lithography effects too simplistically. Certain effects, like corner rounding or line end shortening, are not taken into account. Therefore, it is important to obtain realistic structures from a lithography simulation and feed them into front end TCAD simulation. ISE and SIGMA-C tools can be hosted in the ISE framework, where parameters for lithography and process simulations can be managed simultaneously. Linking lithographic lith·o·graph  
n.
A print produced by lithography.

tr.v. lith·o·graphed, lith·o·graph·ing, lith·o·graphs
To produce by lithography.
 parameters, like defocus de·fo·cus  
tr.v. de·fo·cused or de·fo·cussed, de·fo·cus·ing or de·fo·cus·sing, de·fo·cus·es or de·fo·cus·ses
To cause (a beam or a lens) to deviate from accurate focus.

n.
 and dose, to device characteristics reveals the true influence of lithography settings. Metrology specifications for the resist profile are then redundant.

About ISE

ISE is a leading provider of TCAD tools worldwide. It focuses on TCAD and offers software solutions and consulting services to the world's largest semiconductor fabrication fabrication (fab´rikā´shn),
n the construction or making of a restoration.
 facilities. ISE tools for process and device simulation reduce the cost of ICs by reducing the need for experiments. ISE TCAD provides early feedback describing the impact of process and device design changes at any stage of product design and process development cycles. The simulation programs are equipped with the latest physical models and algorithms. Programs such as DESSIS DESSIS Device Simulation For Smart Integrated Systems  for device simulation, and DIOS DIOS Desorption-Ionization on Silicon
DIOS Distal Intestinal Obstructive Syndrome
DIOS Distributed Intelligent Operating System
 and FLOOPS for process simulation are benchmarked in simulation projects to keep up with technology advancement. ISE collaborates with universities and research departments worldwide to improve its products. Founded in 1993, the company is privately held. Its headquarters is located in Zurich, Switzerland with subsidiaries and branch offices around the world:

Integrated Systems Engineering, Inc. (U.S.A.)

ISE Japan Ltd.

ISE Integrated Systems Engineering AG Zurich, Korea Branch

ISE Integrated Systems Engineering AG Zurich, Taiwan Branch

For more information, visit our website at http://www.ise.com

About SIGMA-C

SIGMA-C is a leading provider of applied simulation software for semiconductor manufacturers, equipment suppliers, and photomask An opaque image on a translucent plate that is used as a light filter to transfer an image from one device to another. See chip.  producers throughout the world. The company's product portfolio includes engineering tools, such as lithography simulation software, as well as production tools for fullchip data preparation, data analysis, and optical proximity correction Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The two most common applications for OPC are linewidth differences between features in regions of different density (e. . SIGMA-C's flagship simulation software models the entire optical lithography process flow in a three-dimensional programming environment, allowing users to optimize processes prior to actual production. This can significantly improve product yields, cycle times, and equipment utilization. All leading-edge semiconductor manufacturers use SIGMA-C's tools. Founded in 1987, SIGMA-C is headquartered in Munich, Germany with a U.S. subsidiary in Campbell, California Campbell (IPA: /ˈkæmbəl/) is a city in Santa Clara County, California, part of Silicon Valley, in the San Francisco Bay Area. [2] As of 2007 population estimates, Campbell's population is 39,200.  and a Korean subsidiary in Seoul. More information is located at http://www.sigma-c.com

Trademarks

SOLID-CTM is a trademark of SIGMA-C. All trademarks and registered trademarks are the property of their respective owners.
COPYRIGHT 2002 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2002, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Dec 4, 2002
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