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Hitachi High-Technologies Launches Mask Design Data Measuring System.


Tokyo, Japan, July 11, 2006 - (JCN JCN Japan Corporate News
JCN Journal of Cognitive Neuroscience
JCN Journal of Cardiovascular Nursing
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JCN joint communications network (US DoD) 
) - Hitachi High-Technologies, a leading manufacturer of electron microscopes electron microscope: see microscope. , has launched DesignGauge, a system that automatically generates metrology metrology

Science of measurement. Measuring a quantity means establishing its ratio to another fixed quantity of the same kind, known as the unit of that kind of quantity.
 design recipes based on design information.

The Windows system compares and verifies the semiconductor pattern that has been transferred to the wafer against the design information with a high degree of precision. Compared with the conventional system, it is capable of generating metrology recipes off line.

DesignGauge also features a remotely controlled scanning electron microscope scan·ning electron microscope
n. Abbr. SEM
An electron microscope that forms a three-dimensional image on a cathode-ray tube by moving a beam of focused electrons across an object and reading both the electrons scattered by the object and
. In addition, it can measure differences between CAD data and actual semiconductor patterns, reducing time to acquire images to 1/5 the time it takes with conventional approaches.

Copyright [c] 2006 Japan Corporate News Network. All rights reserved.
COPYRIGHT 2006 Japan Corporate News Network K.K.
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2006, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:JCNN News Summaries
Geographic Code:9JAPA
Date:Jul 12, 2006
Words:116
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