Hitachi High Technologies reaches 300mm Silicon Etch system milestone.Hitachi High Technologies America (HHTA HHTA Hocking Hills Tourism Association (Ohio) HHTA Home Health Therapy / Attachment HHTA Hiland Hall Turner Architects (Bernardsville, New Jersey) HHTA Harrington Harbour Tourism Association ) has announced that its 700 Series Silicon Etch platform was selected by Texas Instruments See TI. (company) Texas Instruments - (TI) A US electronics company. A TI engineer, Jack Kilby invented the integrated circuit in 1958. Three TI employees left the company in 1982 to start Compaq. (TI) for its semiconductor production. Achieving a major milestone in the history of the 700 Series system, the TI delivery marks the 100th 700 Series chamber delivered in the US for etching sub .13um features in production. "The M700 system's reliability and process performance were key factors in our selection," said Greg Winterton, Integration Engineering Manager at Texas Instruments. "In addition, HHTA demonstrated superior on-site process and equipment support throughout our evaluation and selection period. We have been very pleased with HHTA's commitment to support our 300mm efforts." Craig Kerkove, Vice President, Semiconductor Equipment Division said, "We are honored to be selected by a technology and manufacturing leader such as Texas Instruments. The combination of our latest technology, excellent tool reliability, and an award winning service team will make this new relationship a success." The 700-Series (200mm/300mm) etch system provides state-of-the-art etch and integrated automation processing capability with high productivity and industry leading equipment performance and reliability. Designed to meet today's demanding sub-0.1(mu)m technology performance requirements and tomorrow's next generation requirements, the Hitachi 700-Series etch platform can be configured to etch poly-silicon gates and trenches, nitrides, standard and low-k dielectric materials Dielectric materials Materials which are electrical insulators or in which an electric field can be sustained with a minimal dissipation of power. Dielectrics are employed as insulation for wires, cables, and electrical equipment, as polarizable media for , metals, and other novelty materials. Hitachi High Technologies, a subsidiary of Hitachi, Ltd. (NYSE NYSE See: New York Stock Exchange :HIT), headquartered in Tokyo, Japan, is engaged in activities in a broad range of fields, including device manufacturing equipment, life sciences, information technology, electronic components, and advanced industrial materials. HHT HHT Hereditary Hemorrhagic Telangiectasia (Osler-Rendu-Weber disease) HHT Headquarters Troop HHT Hand-Held Terminal HHT House Hunting Trip HHT Heinrich Hertz Telescope HHT Headquarters & Headquarters Troop consolidated sales for 2001 were over $5.9B. Hitachi High Technologies America, headquartered in Schaumburg, IL, sells and services a full range of products for metrology, SOI (Silicon On Insulator) A chip architecture that increases transistor switching speed by reducing capacitance (build-up of electrical charges in the transistor's elements), and thus reducing the discharge time. The power requirement is also reduced in some designs. wafer manufacturing, etch, defect review and inspection and failure analysis. HHTA is comprised of seven business units: Electron Microscope electron microscope: see microscope. , Semiconductor Equipment, Life Sciences, Electronics Applied Systems, Electronic Components, Electronic Products and Advanced Materials. Projected sales for FY 2002 are approximately $1062M. |
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