Genus announces multiple system order from Samsung exceeding $22 million; record sales includes major order for new CVD cluster tool.SUNNYVALE, Calif.--(BUSINESS WIRE)--Dec. 6, 1994--Samsung Electronics has place an order with Genus Inc. exceeding $22 million for multiple chemical vapor deposition Chemical vapor deposition (CVD) is a chemical process used to produce high-purity, high-performance solid materials. The process is often used in the semiconductor industry to produce thin films. (CVD CVD Cardiovascular disease, see there ) and high energy (MeV) ion implantation systems for 16Mbit and 64Mbit production. The order includes several Genus 7000 CVD systems, a new tungsten silicide sil·i·cide n. A compound of silicon with another element or radical. Noun 1. silicide - any of various compounds of silicon with a more electropositive element or radical cluster tool recently introduced at the SEMICON/Japan trade show. The Genus 7000 has been in beta site testing at Samsung since June. Delivery of the systems will begin this month and continue through the first half of 1995. Kevin Conlon, vice president of marketing at Genus, said Samsung has been using the beta site 7000 with a dichlorosilane (DCS (1) See also DSC. (2) Digital Cross-connect System) A network switching and grooming device used by telecom carriers. See digital cross-connect. ) tungsten silicide chemistry to develop 0.25-micron CVD processes for advanced DRAM manufacturing. Samsung is the world's leading supplier to the $14 billion DRAM market. Genus also announced the sale of additional CVD systems to Samsung for capacity expansion on other lines. The Genus 1510 ion implant systems ordered are ultraclean broad-range systems which provide a 40 KeV to 3 MeV energy range for medium-to-high energy (MeV) implant applications. Conlon said Samsung already has several Genus implanters installed on its 16Mbit DRAM production lines and that an additional Genus MeV system is presently being used for R&D. Genus, Sunnyvale, is a world leader in silane and DCS tungsten silicide CVD technology. In addition, the company is also an established leader in the manufacture of high energy (MeV) ion implantation equipment. Genus' stock is traded on the NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on National Market System under the symbol GGNS GGNS Grand Gulf Nuclear Station . CONTACT: Genus Inc., Sunnyvale
Nancy Ellickson, 408/747-7120
Mathews & Clark
Ed Rebello, 408/736-1120
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