GaSonics Announces Multi-System Order from Lucent Technologies; New Tools to Address Advanced Processes Including Copper Interconnects.

SAN JOSE, Calif.--(BUSINESS WIRE)--Aug. 25, 1999--

GaSonics International Corp. (Nasdaq NM: GSNX), a leading supplier of Integrated Clean(TM) solutions, today announced a multi-system order for its PEP Iridia DL(TM) system from Lucent Technologies (NYSE: LU) for its Cirent Semiconductor manufacturing division, and for Lucent's Bell Laboratories Advanced Development and Research Facility both in Orlando, Fla.

The Iridia--GaSonics' latest and most advanced tool capable of performing both photoresist and residue removal in a single chamber--will be used specifically in copper and aluminum-based metallization schemes for the manufacture of both logic and wireless communication devices with 0.25 micron and below design rules. The Iridia systems are slated to ship over the next three quarters.

Increasingly, chipmakers are turning to dry etch removal tools as they integrate copper into advanced chips to achieve faster processing speeds with greater reliability. Iridia delivers a demonstrated capability on leading-edge copper technology and offers advanced post-etch residue removal (PERR).

"This is a milestone order for GaSonics," explained the Company's vice president of worldwide operations, Bill Alexander. "It demonstrates our ability to address the challenges of copper and low-k dielectrics, as well as technology development below 0.18 micron." Alexander added that "the Company pioneered a new, dry plasma source with the Iridia to offer damage-free, residue-free process results, which ultimately reduce, and have the potential to eliminate, costly wet cleaning steps. Simultaneously, the Iridia is designed to increase chipmakers' productivity in a number of applications, including implanted resist and post-etch residue removal."

"GaSonics currently has numerous systems being evaluated by leading fabs worldwide," added Alexander. "This order validates our strategic approach, which postulates that Integrated Clean solutions will become a major market as the industry migrates toward 0.18 micron geometries. We have demonstrated technology for high-dose implanted photoresist removal, as well as post-via aluminum and copper etch residue removal. In addition, our systems come with software, service and support that represent an attractive cost of ownership."

According to San Jose, Calif.-based market research firm Dataquest, in the dry strip equipment segment, GaSonics holds 29% marketshare (June 7, 1999). With the introduction of the Iridia last month, GaSonics furthered its ability to address the most advanced PERR clean steps in addition to removal of the resist itself, both of which have increased in complexity with the introduction of high-dose and high-energy implant techniques. These critical clean steps represent approximately half of the total available market for Integrated Clean solutions.

Management would like to remind readers that any forward looking statements in this press release are always subject to risks in this ever-changing marketplace, including the cyclicality in the markets served by the Company's customers, market acceptance of new and enhanced versions of the Company's products, the stability of the Asia-Pacific region, the mix of products sold, the timing of significant orders and delays, deferrals, rescheduling or cancellation of orders, the relationship of operating expenses to revenue, and the proportion of direct sales and sales through distributors. For a more detailed discussion of these and associated risks, the Company refers the readers to documents filed with the Securities and Exchange Commission (SEC) from time to time, specifically, the most recent Form 10-K and Form 10-Q.

GaSonics International (Nasdaq NM: GSNX) is a leading global supplier of Integrated Clean solutions. GaSonics' photoresist and residue removal tools improve device performance and increase yield in semiconductor manufacturing. GaSonics' technology leadership also includes vertical high-pressure (VHP) thermal processing for ultra-thin gate oxides and low-pressure chemical vapor deposition (LPCVD) for liquid-crystal display (LCD) manufacturing. Headquartered in San Jose, Calif., GaSonics supports its installed base of more than 4,500 systems through a global sales and support network. Additional information about the Company is available on GaSonics' website, located at http://www.gasonics.com.

Cirent Semiconductor is a manufacturing division of Lucent Technologies' (NYSE: LU) Microelectronics Group. The Company, initiated in October 1995, enhances Lucent's ability to meet the worldwide demand for advanced integrated circuits in communications, computer, and networking products. The Orlando facility is the largest manufacturer of semiconductor devices in Florida. Bell Labs' process development laboratories are located at the Cirent Semiconductor facility. More information about Cirent Semiconductor is available at http://www.cirent.com.

Note to Editors: Integrated Clean(TM) and the Performance Enhancement Platform (PEP) Iridia DL(TM) are licensed trademarks of GaSonics International.